应用于数字散斑干涉测量的相移器结构设计  

Structural Design of Phase Shifter Applied for Digital Speckle Pattern Interferometry

作　　者：刘承运 吴思进[1] 李伟仙[1] 杨连祥[2] LIU Chengyun;WU Sijin;LI Weixian;YANG Lianxiang(School of Instrumentation Science and Opto-Electronic Engineering,Beijing Information Science and Technology University,Beijing 100192,China;Department of Mechanical Engineering,Oakland University,Michigan 48309,USA)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院,北京100192 [2]奥克兰大学机械工程系,密歇根48309

出　　处：《自动化仪表》2018年第7期61-64,共4页Process Automation Instrumentation

基　　金：国家自然科学基金资助项目(51675055;11672045);国家重大科学仪器设备开发专项基金资助项目(2016YFF0101801)

摘　　要：针对传统基于压电陶瓷的相移器存在的反射镜偏转和测量误差问题,设计了一种应用于数字散斑干涉测量的相移器结构。通过双夹持臂的结构起到导向作用,能够直接减小相移过程中出现的反射镜偏转问题,进而有效降低了传统相移器由于反射镜偏转导致的相移误差,提高了相移器的工作精度。通过计算反射镜偏转所造成的测量误差,对传统相移器和所设计的相移器进行力学性能仿真分析和试验。试验结果表明,在相同条件下,相对于传统相移器结构,所设计的相移器结构可减少30%的相移误差,大幅提高了数字散斑干涉技术的测量精度。在数字散斑干涉测量中,所设计的相移器结构具有很强的实用性。Aiming at the disadvantages of traditional piezoelectric ceramic-based phase shifter,i. e.,deflection of reflection mirror and measurement error,a new structure of phase shifter applied in digital speckle pattern interferometry is designed. Through the double clamping arm structure to play a guiding role,the deflection of reflection mirror can be directly reduced,thus the phase shift error is decreased effectively and the operational accuracy of the phase shifter is improved. The measurement error caused bymirror deflection is calculated,and simulation analysis and tests of traditional phase shifter and proposed phase shifter are conducted. The results prove that compared with traditional phase shifter,the phase shift error is reduced up to 30% by the new structured phase shifter. Consequently,the measurement accuracy of digital speckle patter interferometry is improved greatly,and it shows that the designed phase shifter structure has strong practicability in digital speckle interference measurement

关 键 词：数字散斑干涉测量 相移技术 相移器 电荷耦合器 变形测量 

分 类 号：TH703[机械工程—仪器科学与技术] TP202[机械工程—精密仪器及机械]