三坐标测量机微纳探头的设计与验证  

Design and Verification of Micro/nano-probes for Coordinate Measuring Machine

作　　者：范光照[1,2] 李瑞君[2] FAN Guangchao;LI Ruijun(Department of Mechanical Engineering,National Taiwan University,Taibei 10617,China;School of Instrument Science and Opto-eleetrie Engineering,Hefei University of Technology-,Hefei 230009,China)

机构地区：[1]台湾大学机械工程学系,台湾台北10617 [2]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《计测技术》2018年第3期60-81,共22页Metrology & Measurement Technology

基　　金：国家自然科学基金项目(51675157)

摘　　要：介绍了国内外测量探头的研究现状;设计了基于簧线和簧片的弹性机构,建立了典型结构:弹性机构的刚度模型,对不同形状的弹性机构进行了仿真验证;介绍了作者团队研制的几种光学传感器及八款三坐标测量机微纳探头,对探头的性能进行了实验验证与测试;对三坐标测量机微纳测量探头的研究和发展趋势进行了总结和展望。The recent progress of probes for coordinate measuring machine（ CMM） was reviewed. The elastic mechanisms for the probes based on elastic strings and leaf springs have been designed. A typical structure, the stiffness model of the elastic mechanisms was established. The elastic mechanisms with different shapes have been verified by simulation using ANSYS software. Eight probes based on different optical sensors were introduced. The performance and practicality of these probes were verified by experiment and tested. Finally,the research and development trends of the micro/nano probes for CMMs were summarized and prospected.

关 键 词：计量学 微纳米三坐标测量机 探头 

分 类 号：TB92[一般工业技术—计量学]