基于组合面型基准件的多参数测量方法  

Multi-parameter measurement method based on combined surface reference

作　　者：李杏华[1] 邢艳蕾 房丰洲[1] 刘培露 苏智琨[1] Li Xinghua;Xing Yanlei;Fang Fengzhou;Liu Peilu;Su Zhikun(State Key Laboratory of Precision Measuring Technology and Instrument,Tianjin University,Tianjin 300072,Chin)

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《红外与激光工程》2018年第7期139-144,共6页Infrared and Laser Engineering

基　　金：国家自然科学基金(51375338)

摘　　要：针对运动物体空间多维位姿检测过程繁琐、设备笨重及昂贵等问题,提出了一种可以完成运动体4个参数同时测量的光学非接触测量方法。该系统由旋转抛物面与平面构成的组合面型基准件和光学测头两部分组成。基于平面镜反射原理和组合面型基准件的面型特征,分别建立了运动轴的俯仰角、偏摆角和二维位移的角度测量模型,并完成了系统的精度评价与重复性实验。实验结果表明:该系统的测角精度为1.5″,位移精度为1μm,为机床误差辨识打下了基础。In order to solve the problems of complicated process, bulky and expensive apparatuses in multi-dimensional position detection of a moving body, an optical non-contact measurement method of simultaneously measuring four parameters of a moving object was proposed. The system consisted of a combined surface reference composed of a rotating paraboloid and a plane, and an optical probe. Based on the principle of plane mirror reflection and the features of combined surface reference, the angle measurement models of the pitch angle, the yaw angle and the two-dimensional displacements of the moving object were established respectively, and the accuracy evaluation and the repeatability experiments of the system were completed. The experimental results show that the angle accuracy of the system is 1.5 ″,and the displacement accuracy is 1 μm, laying a foundation for the error identification of machine tools.

关 键 词：组合面型 俯仰角 偏摆角 二维位移 

分 类 号：TH741[机械工程—光学工程]