常压射频等离子体沉积TiO2纳米颗粒膜的空间均匀性  

Spatial Uniformity of TiO_2 Nanoparticulate Film Deposited by Atmospheric Radio Frequency Plasma

作　　者：李灵均 戴林君 徐雨 SIDDIG Eashara. A.A. 丁可[1] 黄晓江[1] 李惠 石建军[1,2] 张菁[1,2] LI Lingjun;DAI Linjun;XU Yu;SIDDIG Eshraga.A.A.;DING Ke;HUANG Xiaojiang;LI Hui;SHI Jianjun;ZHANG Jing(College of Science;College of Materials Science and Engineering,Donghua University,Shanghai 201620,China)

机构地区：[1]东华大学理学院,上海201620 [2]东华大学材料科学与工程学院,上海201620

出　　处：《东华大学学报（自然科学版）》2018年第3期467-472,共6页Journal of Donghua University(Natural Science)

基　　金：国家自然科学基金资助项目(10775031,10835004)

摘　　要：常压等离子体增强化学气相沉积(AP-PECVD)薄膜的均匀性是AP-PECVD技术成功应用的关键问题之一。为此,通过基片的微位移实现了TiO_2纳米颗粒薄膜的连续沉积,同时研究了基片的不同移动方式对沉积薄膜的均匀性、表面形貌、结晶结构的影响。研究结果表明:相比单向移动沉积的薄膜,来回移动沉积的薄膜均匀性会得到提高,沉积速率降低;单向移动沉积的薄膜为锐钛矿晶型,而来回移动沉积的薄膜为锐钛矿和金红石混晶结构,且随功率密度的提高,混晶结构中金红石含量提高。由紫外可见吸收光谱分析可知,相比锐钛矿单晶结构,混晶结构的TiO_2薄膜在紫外光区的吸收光谱宽度发生了明显的增宽和红移现象,且金红石含量越高,此现象越明显。根据Kubelka-Munk公式求取TiO_2薄膜的光学带隙可知,锐钛矿和金红石混晶结构会引起能带的错列分布,从而导致光学带隙降低。The thickness uniformity of films prepared by atmospheric pressure plasma enhanced chemical vapor deposition（AP-PECVD） is one of the key problems for its application. To this end, continuous deposition of TiO2 film has been realized by the micro-displacement of substrate. The effect of different movement modes of the substrate on the thickness uniformity, the morphology and the crystallinity of the film has also been studied. The results show that the thickness uniformity increases and the deposition rate decreases when depositing through moving back and forth. The film deposited through moving uniaxially is of anatase crystal form, while the film deposited with back and forth movement is of mixed crystal structure of anatase and rutile,and the crystallinity degree increases with the increase of applied radio frequency power density. According to the analysis of UV-Vis absorption spectra, the mixed crystal structure has an obvious spectrum redshift and widen absorption in the UV range compared with the monocrystalline structure of anatase. The higher content of rutile, the more obvious redshift will be.Based on the bandgap calculation of the TiO2 film derived by Kubelka-Munk function, it is known that the mixed crystal structure of anatase and rutile will cause staggered distribution, thus reducing the bandgap.

关 键 词：常压射频等离子体 连续沉积 TiO2纳米颗粒薄膜 空间均匀性 

分 类 号：O539[理学—等离子体物理]