TOF-SIMS纳秒级脉冲发生器的设计  

Design of Nanosecond Pulse Generator of TOF-SIMS

作　　者：孙玉桥 邱春玲[1] 杨光[1] 李春生[1] SUN Yuqiao;QIU Chunling;YANG Guang;LI Chunsheng(College of Instrumentation ＆ Electrical Engineering,Jilin University,Changchun 130021,China)

机构地区：[1]吉林大学仪器科学与电气工程学院,长春130021

出　　处：《实验室研究与探索》2018年第6期72-75,共4页Research and Exploration In Laboratory

基　　金：国家重大科学仪器设备开发专项(2011YQ050069)

摘　　要：脉冲发生器可为飞行时间二次离子质谱仪(TOF-SIMS)各部件提供精确的工作时序,确保整机正常工作。基于FPGA/NIOS II技术,整个装置具有集成度高、设计灵活的优点。针对TOF-SIMS对延时精度的要求,该装置采用FPGA内部计数器实现10 ns以上的粗延时,用简化后的斜坡电路实现10 ns以下的细延时,并对斜坡电路进行误差分析。实测本脉冲发生器延时分辨率达100 ps,输出信号峰峰值抖动小于200 ps。TOF-SIMS仪器锆石谱图测试结果表明,脉冲发生器的指标满足整机仪器的要求。The pulse generator provides precise working sequence for time of flight secondary ion mass spectrometer（TOF-SIMS）,and ensures the instrument normal running. The pulse generator is based on FPGA/NIOS II,and has advantages of high integration and flexible design. According to the requirements of delay precision made by TOF-SIMS,the unit adopts counter in FPGA to achieve coarse delay that exceeds 10 ns,and adopts slope circuit which is simplified to achieve fine delay that below 10 ns. There is an error analysis for slope circuit. Its delay resolution is measured as100 ps and output peak-to-peak jitter is less than 200 ps. The result of the zircon spectrum of TOF-SIMS instrument demonstrates that the pulse generator parameters meet the requirements of the instrument.

关 键 词：现场可编程门阵列 延时 斜坡电路 同步 

分 类 号：TH84[机械工程—仪器科学与技术]