旋转电极电解电火花切割玻璃微结构试验研究  

Electrochemical discharge cutting of glass microstructures with rotating electrodes

作　　者：刘勇[1] 魏志远 李松松 LIU Yong;WEI Zhi-yuan;LI Song-song(Associated Engineering Research Center of Mechanics ＆ Mechatronic Equipment,Shandong University,Weihai 264209,Chin)

机构地区：[1]山东大学力学与机电装备联合工程技术研究中心,山东威海264209

出　　处：《光学精密工程》2018年第6期1407-1414,共8页Optics and Precision Engineering

基　　金：山东省自然科学基金资助项目(No.2R2018MEE018);国家自然科学基金资助项目(No.51305238);中国博士后基金资助项目(No.2018M630772);山东大学(威海)青年学者未来计划资助项目(No.2015WHWLJH03)

摘　　要：针对高深宽比非导电硬脆材料(如石英玻璃和陶瓷)微结构的加工需求,对微细电解电火花切割加工方法进行了深入研究。首先,提出了使用旋转螺旋微工具电极的电化学放电切割方法,并对切割缝宽模型进行了讨论;其次,对旋转螺旋电极电解电火花切割加工工艺进行了深入的试验研究,试验研究了加工电压、脉冲频率、占空比和主轴转速这些关键工艺参数对切割加工精度的影响。实验结果表明,缝宽随着施加电压和占空比的增加而增加,随着频率、主轴转速和进给速率的增加而减小。最后,通过优化后的参数成功加工出缝宽为135μm的微缝阵列、复杂的封闭微结构以及深宽比达6∶1的微图形结构。由此表明该方法是一种可有效加工高深宽比绝缘硬脆材料微结构的新工艺。An in-depth study of the method of wire electrochemical discharge machining was carried out for fabricating microstructures on non-conductive brittle materials such as quartz glass and ceramics. First, the method of wire electrochemical discharge machining with a rotating spiral tool was proposed and the slit width model was established. Next, the experimental process was studied, and the influence of many key machining parameters such as the voltage, pulse frequency, duty ratio, and spindle speed on the machining accuracy was discussed in detail. The experimental results indicate that the slit width increases with an increase in the applied voltage and duty ratio and decreases with an increase in the frequency, spindle speed, and feed rate. A micro-slit array with a slit width of 135 μm and complex closed microstructures and micrographic structures with an aspect ratio of 6：1 were successfully machined by optimizing the parameters for quartz glass. Therefore, this method may prove to be an effective new technology for machining high-aspect-ratio microstructures on non-conductive, hard, and brittle materials.

关 键 词：电化学放电切割加工 石英玻璃 旋转螺旋工具 高深宽比微结构 封闭结构 

分 类 号：TH703[机械工程—仪器科学与技术]