Ultrathin silica film derived with ultraviolet irradiation of perhydropolysilazane for high performance and low voltage organic transistor and inverter  

紫外光辐照全氢聚硅氮烷制备超薄二氧化硅膜及其在有机晶体管和反相器中的应用（英文）

作　　者：Zhongwu Wang Shujing Guo Qianying Liang Huanli Dong Liqiang Li Zongbo Zhang Feifei Xing Wenping Hu 王中武;郭淑婧;梁倩影;董焕丽;李立强;张宗波;邢菲菲;胡文平(Department of Chemistry, Shanghai University, Shanghai 200444, China;Advanced Nano-materials Division, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China;Tianjin Key Laboratory of Molecular Optoelectronic Sciences, Department of Chemistry, School of Sciences, Tianjin University,Collaborative Innovation Center of Chemical Science and Engineering, Tianjin 300072, China;Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China)

机构地区：[1]Department of Chemistry,Shanghai University,Shanghai 200444,China [2]Advanced Nano-materials Division,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China [3]Tianiin Key Laboratory of Molecular Optoelectronic Sciences,Department of Chemistry,School of Sciences,Tianjin University,Collaborative Innovation Center of Chemical Science and Engineering,Tianjin 300072,China [4]Institute of Chemistry,Chinese Academy of Sciences,Beijing 100190,China

出　　处：《Science China Materials》2018年第9期1237-1242,共6页中国科学（材料科学（英文版）

基　　金：the National Natural Science Foundation of China (21573277, 51633006 and 51503221);the National Key Research and Development Program (2016YFA0200700);the Key Research Program of Frontier Sciences of Chinese Academy of Sciences (QYZDBSSWSLH031);the Natural Sciences Foundation of Jiangsu Province (BK20150368)

摘　　要：In recent years, organic electronic devices have become more and more popular, such as organic solar cell （OSC） [1-4], organic light emitting diode （OLED） [5-7] and organic thin film transistor （OTFT） [8-11] by virtue of their light weight, easy-processing and flexibility.二氧化硅是一种常见且非常重要的介电材料,但是其传统的制备方法例如物理气相沉积,化学气相沉积等无法适应大规模生产以及有机电子工业.本论文介绍了一种简单的制备二氧化硅超薄膜的方法,即利用紫外光辐照全氢聚硅氮烷,使其转化为二氧化硅.这种方法所制备的二氧化硅超薄膜具有超平的表面以及非常低的漏电.此外,我们还将该二氧化硅超薄膜应用于有机晶体管和反相器电路中,这些器件均表现出良好的电学性能.这些结果表明该方法制备的二氧化硅超薄膜具有很好的实际应用前景.

关 键 词：二氧化硅膜 全氢聚硅氮烷 制备方法 有机晶体管 紫外光辐照 超薄膜 反相器 应用 

分 类 号：TB383.2[一般工业技术—材料科学与工程] TQ127.2[化学工程—无机化工]