一种耐高温、耐恶劣环境大压力传感器的设计  

Design of a high pressure sensor resisting high temperature and harsh environment

作　　者：吴凌慧 徐冬 WU Linghui;XU Dong(China Electronics Technology Group Corporation No.49th Research Institute,Harbin 150001,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《应用科技》2018年第4期142-146,共5页Applied Science and Technology

摘　　要：为了解决高温恶劣环境下压力测量问题,设计了一种大压力、高过载、耐高温、耐恶劣环境的小体积压差传感器。通过有限元分析对传感器绝缘体上硅(silicon on insulator,SOI)压力敏感膜片结构进行优化设计,使其能够满足恶劣环境的使用要求。通过试验证明这种压差传感器具有良好的耐高温、耐恶劣环境的特性。In order to solve the problem of pressure measurement under high temperature and harsh environment, a small volume differential pressure sensor resisting high pressure, high overload, high temperature and bad environment was designed and developed. The sensor consisting of silicon on insulator（SOI） pressure sensitive diaphragm was optimized by the finite element analysis method so that it could satisfy the application requirement in bad environment. The experiment proves that the proposed differential pressure sensor has good characteristics of resisting high temperature and harsh environment.

关 键 词：耐高温 大压力 有限元分析 传感器 SOI膜片 力敏电阻条 优化设计 过载试验 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]