光栅横向剪切干涉仪系统误差的校正方法  

Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer

作　　者：张璐 向阳[1] Zhang Lu;Xiang Yang(State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics Chinese Academy of Sciences,Changchun,Jilin 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《中国激光》2018年第8期169-174,共6页Chinese Journal of Lasers

基　　金：国家重大科技专项(2009ZX02005)

摘　　要：针对光栅横向剪切干涉仪研究了旋转绝对检测的方法,并用前36项Zernike多项式标定出剪切装置的系统误差非对称项。研究结果表明,将面形检测的绝对算法应用于检测镜头系统波像差,在干涉仪系统误差消除后可以达到相对理想的检测精度。实验数据的重复性的均方根可以达到0.14nm。The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer,and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup.The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system.In addition,the RMS of the repeatability of the experimental data can approach 0.14 nm.

关 键 词：测量 光刻镜头 绝对检测 光栅横向剪切干涉仪 系统波像差 

分 类 号：O436[机械工程—光学工程]