超精密液体静压转台装配技术  

Manufacture and assembly technique of ultra-precision hydrostatic rotary table

作　　者：胡秋[1] 袁南南[1] 徐冲[1] HU Qiu;YUAN Nannan;XU Chong(Institute of Mechanical Manufacturing Technology,Laboratory of Ultra-sophisticated Machining,China Academy of Engineering Physics,Mianyang 621900,CHN)

机构地区：[1]中国工程物理研究院机械制造工艺研究所超精密加工技术重点实验室,四川绵阳621900

出　　处：《制造技术与机床》2018年第8期102-105,108,共5页Manufacturing Technology & Machine Tool

基　　金：国家重大科学仪器设备开发专项(2011YQ130043);中国工程物理研究院超精密加工技术重点实验室基金重点项目(K855);中国工程物理研究院909重大科技专项(9020602)

摘　　要：制造与装配是高精度液体静压转台核心技术之一。对某超精密液体静压转台,根据其技术要求和结构特点,系统梳理了其装配流程及装配技术难点,提出了支承组件制造与装配精度保证、装配过程变形控制、精度保持性、可靠性考核与提升是转台装配的关键环节并对其控制要点及技术难点提出了解决措施。装配的高精度液体静压转台并应用于某数控立式磨床并累积通过2 500 h应用考核,实现了外圆圆度0.45μm内孔圆度0.45μm的磨削精度,验证了转台工作状态下的动态回转精度、刚度及可靠性。Manufacture and assembly are both core technologies of ultra-precision hydrostatic rotary table. According to the technique requirements and structural specialties of the ultra-precision hydrostatic rotary table,the manufacture and assembly process and its technique difficulties are introduced. Precision assurance of bearing component,deformation control of rotary table in assembly process,precision maintenance,as well as reliability assessment and improvement are the key procedures of the assembly for ultra-precision hydrostatic rotary table,and the solution approaches to the technique difficulties in manufacture and assembly process are proposed. The high precision hydrostatic turntable is developed and used in a CNC vertical grinder for 2 500 h. A quantity of experiments are conducted,and the experimental results show a 0. 45 μm roundness precision of outer circle and a 0. 45 μm roundness of inner hole grinding by this machine tool,which verifies the high dynamic rotary accuracy,rigidity and reliability under working condition of the proposed turntable.

关 键 词：超精密液体静压转台 装配精度保证 装配变形控制 可靠性保证 应用验证 

分 类 号：TG502[金属学及工艺—金属切削加工及机床]