多腔涡旋真空干泵的抽气理论与结构分析  

Pumping theory and structural analysis of multiple-cavity dry scroll vacuum pump

作　　者：段启惠 李灿伦 刘坤[1] 巴德纯[1] 王光玉 孔祥玲 刘在行 张振厚 孙松刚 刘文丽 DUAN Qi-hui;LI Can-lun;LIU Kun;BA De-chun;WANG Guang-yu;KONG Xiang-ling;LIU Zai-hang;ZHANG Zhen-hou;SUN Song-gang;LIU Wen-li(School of Mechanical Engineering and Automation,Northeastern University,Shenyang,110004,China;SKY Technology Development of Chinese Academy of Sciences,Shenyang,110168,China;Shanghai Satellite Equipment Research Institute,Shanghai,200233,China;Hainan Jinpan Electric Co.Ltd,Haikou,57021,China)

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110004 [2]上海卫星装备研究所,上海200233 [3]中国科学院沈阳科学仪器股份有限公司,辽宁沈阳110068 [4]海南金盘电气有限公司,海南海口570216

出　　处：《真空》2018年第4期13-17,共5页Vacuum

基　　金：教育部中央高校基本科研费(N160302001);国家科技重大专项(2017ZX02201005-001)

摘　　要：全球半导体、薄膜等新兴行业的生产制造要求对真空泵的结构设计和优化提出了新的要求与挑战。以高度集成、高效节能、简洁紧凑为代表的创新设计理念取代传统设计要求,是目前真空干泵产品设计的主要趋势。本文提出了一种以多腔式涡旋结构为代表的新型结构,与传统涡旋真空泵结构不同,通过多涡旋的集成创新设计,得到多腔涡旋优化结构,具有高集成性和紧凑性的特点。论文以并联式涡旋盘结构展开讨论,基于涡旋啮合原理,分别建立了各涡旋转子的型线方程,通过分析抽气理论数学模型,对比了相同尺寸下,新型多腔结构与传统单腔结构的抽速、热变形、气体载荷分布等性能参数。以四腔结构为例,计算和分析结果表明,并联式新型多腔涡旋结构在提高抽速和获得均匀的气体载荷分布方面有明显的优势,在相同的外形参数下,抽速提高了48.95%,密封线长度减小了41.62%,且在相同的进排气口压强下,四腔涡旋盘最大变形量仅为单腔结构的51.22%。New requirements and challenges for the structural design and optimization of vacuum pumps are requested by global manufacturers of semiconductors, films and other emerging industries, resulting in main trend of innovative design concept of vacuum dry pumps with highly integrated, energy-efficient and compacted characteristics. This paper proposed a novel multi-cavity scroll structure that was different from the traditional scroll vacuum pump, which achieved high integration and compactness through multi-scroll integration. Taking the parallel structure as an example, based on the meshing principle, the equations of each scroll rotor＇s profile were all established. By establishing the pumping theory model, pumping speed, thermal deformation,gas load distribution and other performance parameters of the new multi-cavity structure were compared with the traditional single cavity structure with the same size. Taking a four-cavity structure as an example, the calculation and analysis results show that the obvious advantages of novel structure are in increasing pumping speed and obtaining a uniform gas load distribution. Under the same basic parameters provided in the text, pumping speed of the scroll pump with new structure was increased by 48.95%,the length of the seal line was decreased by 41.62% and the maximum deformation of the four-cavity scroll was only 51.22% of the single-cavity structure under the same inlet and outlet pressures.

关 键 词：涡旋真空泵 多腔 优化理论 转子型线 有限元 

分 类 号：TB752.2[一般工业技术—真空技术]