窄带滤光片设计中敏感度的影响因素  

Influence factors on sensitivity in design of narrow band-pass filter band

作　　者：侯海港 刘桂武[1] 邵海成 王明松[1] 乔冠军[1,2] HOU Haigang;LIU Guiwu;SHAO Haicheng;WANG Mingsong;QIAO Guanjun(School of Materials Science and Engineering,Jiangsu University,Zhenjiang,Jiangsu 212013,China;State Key Laboratory for Mechanical Behavior of Materials,Xi＇an Jiaotong University,Xi＇an,Shaanxi 710049,China)

机构地区：[1]江苏大学材料科学与工程学院,江苏镇江212013 [2]西安交通大学金属材料强度国家重点实验室,陕西西安710049

出　　处：《江苏大学学报（自然科学版）》2018年第4期420-424,共5页Journal of Jiangsu University：Natural Science Edition

基　　金：江苏省双创人才项目([2013]477);江苏省双创团队项目([2015]26);江苏省"六大人才高峰"项目(2014-XL-002)

摘　　要：窄带滤光片设计中,通过改变一些参数可以设计出性能较好的窄带滤光片,但是有些理论设计却和制备的结果不符.为了揭示它们之间的变化关系,在光学薄膜设计软件Essential Macleod中进行了模拟试验.针对窄带膜系中的高低折射率间隔层、反射层层数、干涉级次和腔数对窄带滤光片设计与制备中敏感度的影响进行了分析.结果表明:增加反射层层数,会使陡度变好,半宽度变窄,矩形度变差,同时无论采用高折射率还是低折射率材料为间隔层都会增加膜系的敏感度,增大制备难度;增加干涉级次,会使陡度变好,半带宽变窄,矩形度变好,窄带滤光片的敏感度不会受到影响,然而当采用低折射率材料作为间隔层时,随着干涉级次的增加,敏感层(间隔层)会增大厚度误差和制作难度;增加腔数,会使陡度变好,半宽度变宽,矩形度变好,若以高折射率材料为间隔层则对膜系的敏感度没有影响,但是若以低折射率材料为间隔层则会增加膜系的敏感度.For designing narrow bandpass filter, better narrowband filter can be obtained by changing some parameters, but some theoretical designs are different with preparation results. To reveal the relationship between design and preparation, the simulation experiments were carried out with Essential Macleod software. The effects of high and low refractive index interval layer, number of reflectors, interference order and number of cavities on the sensitivity of narrow bandpass filter design and preparation were analyzed. The results show that the steepness can be improved with increased half bandwidth and rectangularity when the number of mirror layers is increased. The sensitivities of thin film narrow bandpass filters with both high and low refractive index cavity layer are increased, and the fabrication difficulty is increased. With the increasing of interference orders,the steepness is improved with decreased half bandwidth and increased rectangularity, and the sensitivity of thin film narrow bandpass filters cannot be affected. Using low refractive index material as cavity layer, the sensitive layers （cavity layer） can increase the thickness error and the fabrication difficulty with the increasing of interference orders. With the increasing of the number of cavities, the steepness can be improved with increased half bandwidth and rectangularity. The sensitivity of thin film narrow bandpass filters cannot be affected with high refractive index materials as cavity layer, while it is increased with low refractive index materials as cavity layer.

关 键 词：窄带滤光片 光学薄膜 敏感度 膜系设计 影响因素 

分 类 号：O484.4[理学—固体物理]