PSD法在超精密加工质量评价中的应用  

Application of PSD method in ultra-precision machining quality evaluation

作　　者：闫英 周平[1] 郭晓光[1] 王一奇 白倩 司立坤[1] YAN Ying;ZHOU Ping;GUO Xiao-guang;WANG Yi-qi;BA;S(Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024

出　　处：《实验室科学》2018年第4期11-14,共4页Laboratory Science

基　　金：国家自然科学基金项目(项目编号:51605079)

摘　　要：功率谱密度法(Power Spectral Density,PSD)从物理意义上来讲就是单位频率内的信号能量,用于描述随机过程的功率与频率之间的关系。PSD法可以用于分析超精密加工表面的形貌特征,也可以分析不同频率在表面形貌中的分布,从而评价加工工艺对超精密加工表面质量的影响。利用一维PSD的方法,评价了磨削硅片、抛光硅片、抛光铜片表面的质量,通过结果分析可知,与表面粗糙度方法相比,PSD方法可以更全面地评价被加工工件的表面质量。因此,需要在实验室教学过程中引导学生关注功率谱密度分析方法,建立功率谱密度函数与超精密加工表面质量之间的关系。Power Spectral Density （PSD ） is the signal energy per unit of frequency and widely used to describe the relationship between the power and frequency in the random process. The P S D method can be used to analyze the topography characteristics of ultra-precision machined surfaces and to analyze the distribution of different frequencies in surface topography to evaluate the effect of machining proces-ses on the surface quality of ultra-precision machined surfaces. By using the one-dimensional and two -dimensional PSD method,the quality of the surface of the ground silicon wafer,the polished silicon wafer and the polished copper surface is evaluated. According to the results,the P S D method is more suitable to evaluate the machined workpiece than the surface roughness method. 1t is necessary to lead the students focus on the application of P S D in the field of ultra-precision machining.

关 键 词：功率谱密度 超精密加工 表面形貌 质量评价 

分 类 号：TH16[机械工程—机械制造及自动化]