大口径石英元件精密清洗工艺研究  

Research of precision cleaning technology of large caliber optics

作　　者：王韬[1] 吕海兵[1] 赵松楠[1] 严鸿维[1] 王海军[1] 袁晓东[1] WANG Tao;LYU Haibing;ZHAO Songnan;YAN Hongwei;WANG Haijun;YUAN Xiaodong(Research Center of Laser Fusion,CAEP,Mianyang,Sichuan 621900,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《清洗世界》2018年第8期43-49,共7页Cleaning World

基　　金：国家自然科学基金资助项目(61405180)

摘　　要：本文采用酸蚀刻结合超声波清洗的方式对石英元件表面进行精密洁净清洗,利用光学显微镜观测了英元件清洗前后的表面状态,利用暗场成像系统监测了元件整体清洗情况,利用表面颗粒计数器、接触角测量仪、荧光光谱仪和红外光谱仪检验了元件清洗效果,通过实验研究,对石英元件精密清洗工艺进行了定型。Wet etch wia ultrasonic cleaning method was used to treat the surface of silica optics,the surface state before and after cleaning was abserved by microscope,the cleaning condition was monitored by dark field imaging system,the cleaning effect was test by particle counter,drop shape analysis method,fluorescence spectrometer and infrared spectrometer,finalize the design of precision cleaning technology of large caliber optics was confirmed.

关 键 词：精密清洗 湿化学蚀刻 七频超声清洗 石英元件 

分 类 号：TN249[电子电信—物理电子学]