硅酸镓镧声表面波传感器的压力温度多参数解耦分析  

Multi-parameter decoupling of pressure and temperature for surface acoustic wave sensor based on langasite

作　　者：赵一宇[1] 李红浪[1] 程利娜[1] 柯亚兵[1] 郭霄鹏[2] 何世堂[1] ZHAO Yiyu;LI Honglang;CHENG Lina;KE Yabing;Guo Xiaopeng;He Shitang(Acoustical Microelectromechanical System Laboratory,Institute of Acoustics,Chinese Academy of Science Beijing 100190;Beijing Institute of Technology,School of Optoelectronics Beijing 100081)

机构地区：[1]中国科学院声学研究所声学微机电系统实验室,北京100190 [2]北京理工大学光电学院,北京100081

出　　处：《声学学报》2018年第5期810-816,共7页Acta Acustica

基　　金：国家自然科学基金(11174318,11304346);国家高技术研究发展计划(863计划)(SS2013AA041103);北京市科技计划课题(Z141100003814016)资助资助

摘　　要：针对硅酸镓镧声表面波压力传感器,提出了一种温度和压力的多参数解耦方法。理论上采用有限元方法与微扰理论结合,计算传感器在不同温度、压力下频率响应。根据计算结果,构造出传感器温度与压力的解耦公式。以一种基于LGS（0°,0°,100°）点压力式SAW传感器为例,理论计算得到其温度与压力解耦公式的具体参数,同时与在-55℃-125℃,0-1 MPa范围内的实验测试结果对比。理论分析和实验测试结果基本吻合,验证了温度压力多参量解耦方法的正确性。For Surface Acoustic Wave （SAW） pressure sensor based on Langasite （LGS）, a multi-parameter decoupling method of the pressure and temperature interference is proposed. Theoretically, frequency response in different temperature and pressure is calculated by the method which combines Finite Element Method （FEM） and the perturbation theory. Taking a SAW pressure sensor based on （0°, 0°, 100°） LGS substrate with point load structure as an example, the parameters of the decoupled formula is calculated. The experiment is carried out under a temperature scope of -55℃-125℃and a pressure scope of 0- 1 MPa. The experimental frequency response coincides with the theoretical result, which shows a reasonability of the decoupling method.

关 键 词：声表面波传感器 压力温度 解耦分析 硅酸镓镧 计算结果 SAW传感器 解耦方法 实验测试 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]