Ag负载TiO_2纳米管阵列的制备及紫外探测性能研究  

Synthesis of Ag-loaded TiO_2 Nanotube Arrays and Their UV Detection Performance

作　　者：程宏伟 李刚[1] 郭丽芳[1] 程再军 

机构地区：[1]太原理工大学信息工程学院新型传感器和智能控制系统教育部(山西省)重点实验室微纳系统研究中心,太原030024 [2]厦门理工学院光电与通信工程学院,福建厦门361024

出　　处：《半导体光电》2018年第4期528-532,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61674113;51622507;61471255);山西省自然科学基金项目(2014011019-1;20141001021-2;2016011040);山西省回国留学人员科研项目(2013-036);山西省人社厅留学人员择优项目([2013]251);人社部留学人员择优项目([2014]240);山西省高校科技创新研究项目(2016138)

摘　　要：利用阳极氧化方法制备了高度有序的TiO_2纳米管阵列,采用化学还原AgNO3在纳米管表面均匀沉积了Ag纳米颗粒以形成Ag/TiO_2/Ti(MSM)结构的紫外探测器,并通过SEM和EDS对形成的TiO_2-Ag纳米管进行形貌表征和成分分析。通过测试不同光照强度、不同偏压下的电压-电流(I-V)和电流-时间(I-t)曲线,研究了MSM结构在紫外光下的光电特性。实验发现,在偏压为1V、光照强度为1.04mW/cm2的375nm紫外光照射下,基于TiO_2-Ag肖特基结的紫外探测器光电流可达46.9μA,响应度为0.21A/W,外量子效率(EQE)为70.8%。研究结果表明,Ag负载的TiO_2纳米管阵列具有良好的紫外探测性能。Highly ordered TiO2 nanotube arrays were fabricated by anodic oxidation method.Uniformly dispersed Ag nanoparticles were successfully loaded on surface of the TiO2 nanotube arrays through a chemical reduction AgNO3 method and MSM ultraviolet detector with Ag/TiO2/Ti structure was fabricated.TiO2-Ag nanotube arrays were characterized by SEM and EDS.The photoelectric performance was investigated by testing voltage-current and current-time curves under different light intensity and different bias.The results show that its photocurrent,responsivity and EQE are 46.9μA,0.21 A/W and 70.8%respectively under 1 Vbias voltage and375 nm ultraviolet with a light intensity of 1.04 mW/cm^2.The results indicate that Ag-loaded TiO2 nanotube arrays have good UV detection performance.

关 键 词：阳极氧化 二氧化钛 银 紫外探测 光响应 

分 类 号：TN36[电子电信—物理电子学]