基于共振光隧穿效应的角加速度传感器设计  

Design of Angular Accelerometer Based on Resonant Optical Tunneling Effect

作　　者：李慧明 邹璐 菅傲群 王雷阳[1,2] 段倩倩 桑胜波 LI Hui-ming;ZOU Lu;JIAN Ao-qun;WANG Lei-yang;DUAN Qian-qian;SANG Sheng-bo(Miero-nano System Research Center,Taiyuan University of Technology,Taiyuan,Shanxi 030024,China;Key Laboratory of Advanced Transducers and Intelligent Control System,Shanxi Province and Ministry of Education,Taiyuan,Shanxi 030024,China)

机构地区：[1]太原理工大学微纳系统研究中心,山西太原030024 [2]太原理工大学新型传感器与智能控制教育部和山西省重点实验室,山西太原030024

出　　处：《计量学报》2018年第5期684-687,共4页Acta Metrologica Sinica

基　　金：国家自然科学基金(61501316;61471255;61474079;51505324);山西省归国留学基金(2015-047);山西省自然科学基金(2013011016-1);山西省人才专项(优秀人才科技创新)项目(201605D211027)

摘　　要：阐述了一种基于共振光隧穿效应的角加速度传感器的设计方法,分析了其传感特性,并以共振光隧穿理论为基础,利用Mathematica软件进行了仿真分析。该加速度传感器的品质因数可以达到1.96×108,远高于经典F-P腔的品质因数8.183×104。灵敏度可以达到0.1°/nm,Resonant optical tunneling effect （ROTE） is used to describe a design method of angular acceleration sensor and its sensing characteristics are analyzed. Finally, through theoretical analysis and simulation calculation using Mathematica based on the resonant optical tunneling effect, the quality factor and sensitivityof the accelerometer reach up to 1.96 x 10^8 and 0.1°/nm, respectively, which is higher than that of the classic F-P cavity.

关 键 词：计量学 角加速度传感器 共振光隧穿效应 灵敏度 品质因数 

分 类 号：TB934[一般工业技术—计量学]