压电器件的精密超声复合电解加工技术  

Design of precision ultrasonic compound electric machining for piezoelectric components

作　　者：孙继欣 张宇 朱永伟[1] SUN Jixin;ZHANG Yu;ZHU Yongwei(College of Mechanical Engineering,Yangzhou University,Yangzhou 225127,Jiangsu,China)

机构地区：[1]扬州大学机械工程学院,江苏扬州225127

出　　处：《陕西师范大学学报（自然科学版）》2018年第5期32-38,共7页Journal of Shaanxi Normal University：Natural Science Edition

基　　金：国家自然科学基金(51775484;51375428);"十三五"装备科研领域基金(61409230403)

摘　　要：设计了用于压电器件精密加工的超声复合电解加工系统,采用组合电加工技术制作工具电极。运用ANSYS软件对超声振动系统进行参数化建模,并用其多物理场耦合功能进行动力学分析,得出超声系统振动特性参数。通过激光微位移传感器进行振动特性参数检测,验证超声振动系统设计及ANSYS模型分析的正确、可靠性。进一步采用超声及其复合电解组合加工方法,对表面镀膜压电器件进行批量加工试验。结果表明:本方法在满足加工精度的基础上,能够大幅提高加工效率,并降低加工成本。The ultrasonic composite electrolytic machining system that can be used for precision machining of piezoelectric devices was designed.The electrodes were made by using a combination of electric machining techniques.The parametrically model of ultrasonic vibration systems was analyed by using ANSYS software,and its multiphysics coupling function was used for dynamic analysis.The parameters of the vibration characteristics of the ultrasonic system were obtained,and the vibration characteristic parameters were detected using a laser micro-displacement sensor to verify the correctness and reliability of the ultrasonic vibration system design and the ANSYS model analysis.Microstructure ultra-sonic machining tests were conducted,and ultrasonic and its composite electrolysis combined processing methods were used to achieve high-precision,high-efficiency,low-cost batch processing of surface-coated piezoelectric devices,demonstrating the feasibility and technical advantages of this method.

关 键 词：压电器件 超声复合电解加工 ANSYS分析 组合加工 

分 类 号：O426.4[理学—声学]