Chirped coupled ridge waveguide quantum cascade laser arrays with stable single-lobe far-field patterns  

作　　者：YUE ZHAO JIN-CHUAN ZHANG CHUAN-WEI LIU NING ZHUO SHEN-QIANG ZHAI LI-JuN WANG JuN-QI LIU SHU-MAN LIU FENG-QI LIU ZHAN-GUO WANG 

机构地区：[1]Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China [2]Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China [3]College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 101408, China

出　　处：《Photonics Research》2018年第8期821-824,共4页光子学研究（英文版）

基　　金：National Natural Science Foundation of China(NSFC)(61435014,61574136,61627822,61774146,61790583);Chinese Academy of Sciences Key Project(CAS Key Project)(QYZDJ-SSW-JSC027,ZDRW-XH-2016-4);Natural Science Foundation of Beijing Municipality(4172060)

摘　　要：Power scaling in a broad area quantum cascade laser(QCL) tends to deteriorate beam quality with the emission of a multiple-lobe far-field pattern. In this paper, we demonstrate a coupled ridge waveguide QCL array consisting of five elements with chirped geometry. In-phase mode operation is secured by managing supermode loss with properly designed geometries of ridges. A single-lobe lateral far-field with a near diffraction limited beam pattern was obtained in the whole current dynamic range. The devices were fabricated with the wet and dry etching method. The regrowth technique of the In P:Fe insulation layer and In P:Si waveguide layer was employed.Such a structure has the potential to optimize the beam quality of the recently reported high-power broad-area QCL with a reduced cascade number.Power scaling in a broad area quantum cascade laser （QCL） tends to deteriorate beam quality with the emission of a multiple-lobe far-field pattern. In this paper, we demonstrate a coupled ridge waveguide QCL array consisting of five elements with chirped geometry. In-phase mode operation is secured by managing supermode loss with properly designed geometries of ridges. A single-lobe lateral far-field with a near diffraction limited beam pattern was obtained in the whole current dynamic range. The devices were fabricated with the wet and dry etching method. The regrowth technique of the InP：Fe insulation layer and InP：Si waveguide layer was employed. Such a structure has the potential to optimize the beam quality of the recently reported high-power broad-area QCL with a reduced cascade number.

关 键 词：量子级联激光器 通讯技术 发展现状 技术创新 

分 类 号：TN248[电子电信—物理电子学] TN92