利用多光子电离显微术研究铜铟镓硒薄膜太阳电池的微纳米膜层结构  

Study of the micro-nano structure of CIGS thin-film solar cell by multiphoton ionization microscopy

作　　者：杨景辉[1,2] 马兰英 包文霞 朱晓农[2] 张楠[2] YANG Jing-hui;MA Lan-ying;BAO Wen-xia;ZHU Xiao-nong;ZHANG Nan(Basic Course Teaching Department,Chinese People＇s Armed Police Forces Academy,Langfang 065000,Hebei China;Key Laboratory of Optical Information Science and Technology,Ministry of Education,Institute of Modern Optics,Nankai University,Tianjin 300071,China;China Petroleum Pipeline Material and Equipment Company Limited,Langfang 065000,China)

机构地区：[1]中国人民武装警察部队学院基础部,河北廊坊065000 [2]南开大学现代光学研究所光学信息技术科学教育部重点实验室,天津300071 [3]中油管道物资装备有限公司,河北廊坊065000

出　　处：《光电子．激光》2018年第9期944-949,共6页Journal of Optoelectronics·Laser

基　　金：武警学院2016年度中青年教师科研创新计划课题(KYCX201614)资助项目

摘　　要：基于超短脉冲激光多光子电离显微成像原理,利用平均功率50μW、脉冲重复频率1kHz的50fs激光脉冲,对铜铟镓硒(CIGS)薄膜太阳电池进行深度扫描,比较分析了单纯钠钙玻璃衬底、镀钼钠钙玻璃和铜铟镓硒/钼膜层/钠钙玻璃三种不同结构样品飞秒激光电离辐射信号的差别。实验发现,对应于不同膜层材料的飞秒激光诱导的电离辐射信号强度明显不同,在钠钙玻璃中电离辐射信号的强度约为空气本底的20倍,在Mo背电极层信号强度约为钠钙玻璃衬底的50倍,而CIGS层则出现与其带隙相对应的吸收谷,谷的强度与空气背景相同,利用多光子电离显微术对太阳电池进行逐点扫描可以对CIGS和Mo背电极层的成膜质量、吸收带隙和微纳结构进行精细研究。分析表明,超短脉冲多光子电离显微术对不同物质边界处的变化非常敏感,在具有多层结构的复杂器件的微观特性检测方面具有独特的优势。Based on the principle of ultrashort laser pulse multiphoton ionizati on microscopy,copper indium-gallium diselenide （CIGS） thin films solar cell are scanned in depth dir ection by using 800nm and 50fs laser pulses with repetition rate of 1kHz at a controlled laser power of 50μW.The d ifferences among the ionization radiation signal for soda lime glass substrate only,soda lime glass coated with molybdenum film and CIGS/Mo / soda lime glass are compared and analyzed.The results show that the intensities of the laser-induced ionizat ion radiation signal for different coating materials are distinctively different,the signal intensity of soda lime is 20times larger than that of gas background,and the intensity of Mo layer is 50times larger than that of soda lime,while a vall ey corresponding to the band gap can be found for the CIGS layer,and its intensity is dropped to the level of gas background. The qual ities and properties of the thin films, the band gap of CIGS and micro-nano structure of the thin films may be studied subtly using point-by-point scanning by this method.This investigation results demonstrate that the ultrash ort laser pulse multiphoton ionization microscopy is remarkably sensitive to the changes at boundaries between differen t materials,and thus presents a unique and attractive advantage in the detection of the microscopic properties o f complex devices with multilayer structures.

关 键 词：微纳结构 CIGS薄膜太阳电池 非线性成像 超快光学 

分 类 号：O437[机械工程—光学工程]