表面硬质涂层厚度检测方法研究  

Study of Detection Method on Surface Hard Film Thickness

作　　者：丁旺[1] 王春花[1] 孟峰[1] 付莉莉[1] 钱闯[1] DING Wang;WANG Chunhua;MENG Feng;FU Lili;QIAN Chuang(FAW Wuxi Fuel Injection Equipment Research Institute,Wuxi 214063,China)

机构地区：[1]中国一汽无锡油泵油嘴研究所,江苏无锡214063

出　　处：《现代车用动力》2018年第3期57-60,共4页Modern Vehicle Power

摘　　要：介绍了表面硬质涂厚度检测的5种方法及其检测原理,并对类金刚石(DLC)涂层进行了厚度的检测试验,结果表明该5种检测方法都可以用来检测DLC涂层的厚度。通过5种涂层厚度测量方法的对比分析,确定了不同零件状态下DLC涂层厚度的检测方法。Five measuring methods and principal of measuring the thickness of the surface hard film were introduced,and then the thickness of the DLC film was tested. The results show that all the five detection methods can be used to detect the thickness of the DLC film. By comparing analysis of different thickness testing methods,the method of detecting the DLC film thickness in different condition was determined.

关 键 词：类金刚石涂层 厚度 检测原理 检测方法 比较分析 

分 类 号：TK423.8[动力工程及工程热物理—动力机械及工程]