一种基于微波环形谐振器的无线无源气体传感器  

A Wireless Passive Gas Sensor Based on the Microwave Ring Resonator

作　　者：康文芳 谭秋林[1,2] 熊继军[1,2] 卫凯龙 董和磊[1,2] Kang Wenfang;Tan Qiulin;Xiong Jijun;Wei Kailong;Dong Helei(Science and Technology on Electronic Test and Measurement Laboratory;Key Laboratory of Instrumentation Science ＆ Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, China)

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2018年第10期729-732,761,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金青年基金资助项目(61501409)

摘　　要：介绍了一种基于微波环形谐振器的氨气监测的气体传感器，通过天线测试其谐振频率随气体体积分数的变化完成感测操作。环形谐振器是通过丝网印刷工艺将其制备在氧化铝基底上，采用碳纳米管与聚苯胺杂质作为气敏材料，并把制备好的气敏材料旋涂在环形谐振器的极板电容间。制备好的气体传感器在氨气中进行测试，实现了在密闭环境下非接触测量，并且分析了在室温下氨气气体体积分数对传感器谐振频率变化及响应恢复时间的影响。结果表明气体体积分数为10^-3时，传感器的灵敏度为11．5MHz。A gas sensor based on a microwave ring resonator for sensing the ammonia gas was proposed. The sensing operation was carried out by testing the variation of the resonant frequen- cy of the gas sensor with the gas volume fraction through the antenna. The ring resonator was prepared on the aluminum oxide substrate by the screen printing process. The carbon nanotubes and polyaniline impurities were used as the gas sensitive materials, and the prepared gas sensitive materials were coated between the plate capacitors of the ring resonator. The prepared gas sensor was tested in the ammonia gas, and the non-contact measurement in the closed environment was realized. Besides, the dependence of the resonant frequency and response-recovery time of the sensor on the ammonia gas volume fraction was analyzed at room temperature. The results show that the sensitivity of the sensor is 11.5 MHz when the gas volume fraction is 10^-3.

关 键 词：微波环形谐振器 聚苯胺 气敏特性 谐振频率 氨气 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]