开尔文探针力显微镜的应用研究现状  

Application Research Status of Kelvin Probe Force Microscopes

作　　者：武兴盛 魏久焱 常诞 马宗敏[1,2] Xingsheng;Wei Jiuyan;Chang Dan;Ma Zongmin(Science and Technology on Electronic Test and Measurement Laboratory;School of Instrument and Electronics, North University of China, Taiyuan 030051, China)

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器与电子学院,太原030051

出　　处：《微纳电子技术》2018年第10期751-756,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金面上项目(61274103);山西省自然科学基金资助项目(201701D121080);山西省自然科学基金(青年)资助项目(2014021023-2)

摘　　要：开尔文探针力显微镜（KPFM）是一种能够对众多材料表面电势纳米级成像的独特工具。首先介绍了开尔文探针力显微镜的基本工作原理和系统的建立。系统综述了开尔文探针力显微镜的国内外应用研究现状，包括开尔文探针力显微镜在物理、材料和生物等领域的重要应用。详细介绍了其在表征金属纳米结构和半导体纳米结构电学性质的超高分辨优势，表征器件纳米结构电学性质的兼容性优势及其他方面的独特的应用前景。指出了开尔文探针力显微镜的可扩展性需提高和物理机制需进一步深入研究，并且展望了开尔文探针力显微镜未来的发展趋势。The Kelvin probe force microscope （KPFM） is a unique tool for nanometer imaging of the surface potential of many materials. The basic working principle and system establishment of the Kelvin probe force microscope are introduced firstly. The application research status both at home and abroad of the Kelvin probe force microscope is summarized systematically, including physical, material and biological fields, etc. The unique advantages of the Kelvin probe force mi- croscope are introduced in detail, i.e. ultrahigh resolution advantages in characterizing the elec- trical properties of metal nanostructures and semiconductor nanostructures, the compatibility ad- vantages in characterizing the electrical properties of the device nanostructures and the unique ap- plication prospects in other aspects. It is pointed out that the extensibility of the Kelvin probe force microscope needs to be improved and the physical mechanism needs to be further studied, and the future development trend of the Kelvin probe force microscope is prospected.

关 键 词：开尔文探针力显微镜(KPFM) 接触电势差 纳米结构 超高分辨率 纳米级成像 

分 类 号：TH742[机械工程—光学工程]