表面具有微纳结构的AZO薄膜制备及性能研究  

Preparation and Properties Study of AZO Thin Films With Micro-nano Structure on the Surface

作　　者：姚婷婷[1] 仲召进[1,2] 李刚 汤永康[1] 杨勇[1] 金克武[1] 王天齐 沈鸿烈 甘治平 马立云[1] YAO Tingting;ZHONG Zhaojin;LI Gang;TANG Yongkang;YANG Yong;JIN Kewu;WANG Tianqi;SHEN Honglie;GAN Zhiping;MA Liyun(Bengbu Design ＆ Research Institute for Glass Industry,State Key Lab.of Advanced Technology for Float Glass Technology,Bengbu 233000,China;College of Materials Science and Engineering,Dalian jiaotong University,Dalian 116028,China;jiangsu Key Lab.of Material and Technology for Energy Conversion,Nanjing 211106,China)

机构地区：[1]蚌埠玻璃工业设计研究院浮法玻璃新技术国家重点实验室,安徽蚌埠233000 [2]大连交通大学材料科学与工程学院,辽宁大连116028 [3]江苏省能量转换材料与技术重点实验室,江苏南京211106

出　　处：《压电与声光》2018年第5期802-806,共5页Piezoelectrics & Acoustooptics

基　　金：安徽省科技攻关计划基金资助项目(1704a0902010;1704a0902014);江苏省能量转换材料与技术重点实验室基金资助项目

摘　　要：采用磁控溅射法及线棒刮涂法在玻璃衬底上室温生长微纳结构铝掺杂氧化锌(AZO)薄膜,使底层AZO薄膜工作压强从1.5Pa调整到0.1Pa。通过扫描电子显微镜(SEM)、X线衍射(XRD)仪、霍尔效应测试系统、分光光度计及光电雾度仪研究了AZO薄膜的表面形貌、晶体结构、电学性能和光学性能。研究结果表明,降低底层AZO薄膜工作压强对微纳结构AZO薄膜光电性能有显著的影响。底层AZO薄膜工作压强0.2Pa时,薄膜表现最低电阻率为6.17×10-4Ω·cm,可见光波段平均光学透光率为82.3%。随着底层AZO薄膜工作压强的降低,薄膜表面形貌、生长形态和晶粒大小发生较大变化,并得到具有陷光作用、优良光电性能的微纳结构AZO薄膜。The micro-nano structure Al-doped ZnO（AZO）thin films were deposited by the magnetron sputtering method and the binding winding bar scraping coating method on the glass substrate at room temperature,and the working pressure of the basement AZO film was adjusted from 1.5 Pa to 0.1 Pa.The structure,surface morphology,optical and electrical properties of the micro-nano structure AZO films were investigated by using X-ray diffractometer（XRD）,scanning electronic microscope（SEM）,Hall effect test system,ultraviolet-visible spectrophotometer and photoelectric fog meter as a function of different working pressure.The results indicated that the resistivity of the micro-nano structure AZO films was dominated by the working pressure of the basement AZO films.The films deposited under 0.2 Pa exhibited the lowest resistivity of 6.17×10^-4Ω·cm.The average optical transmittance was approximately 82.3%in the visible wavelength.With the decrease of working pressure,the surface morphology,growth form and the particle size of the films were changed greatly.The micro-nano structure AZO films with light trapping effect and excellent optical and electrical properties have been obtianed.

关 键 词：铝掺杂氧化锌(AZO)薄膜 表面形貌 微纳结构 亲水性 电学性能 雾度 

分 类 号：TN36[电子电信—物理电子学]