石英增强光声传感技术研究进展  

Recent Progress in Quartz-Enhanced Photoacoustic Spectroscopy

作　　者：董磊[1,2] 武红鹏 郑华丹[1,2] 尹旭坤 马维光[1,2] 张雷 尹王保 肖连团[1,2] 贾锁堂 Dong Lei1,2, Wu Hongpengl,2, Zheng Huadan1,2, Yin Xukun1,2, Ma Weiguang1,2, Zhang Lei1,2, Yin Wangbao1,2, Xiao Liantuan1,2, Jia Suotang1,2(1. State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan, Shanxi 030006, China; 2Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi 030006, China)

机构地区：[1]山西大学量子光学与光量子器件国家重点实验室,激光光谱研究所,山西太原030006 [2]山西大学极端光学协同创新中心,山西太原030006

出　　处：《中国激光》2018年第9期49-60,共12页Chinese Journal of Lasers

基　　金：国家优秀青年科学基金(61622503); 国家自然科学基金(61575113); 山西省“1331工程”重点学科建设计划; 山西省中青年拔尖创新人才支持计划; 山西省“三晋学者”特聘教授支持计划(2017QNSJXZ-04)

摘　　要：主要回顾了近几年石英增强光声传感技术的最新研究进展,展望了未来几年该技术的发展趋势。从石英增强光声传感技术的基本原理开始,介绍了传统的石英增强光声传感器系统的搭建,围绕如何降低系统噪声和进一步提高探测灵敏度展开论述。阐述了定制音叉式石英晶振的建模与设计,详细讨论了如何使用定制的音叉探索新型光谱测声器配置,使探测灵敏度提高两个数量级,并介绍了利用这些定制音叉的泛频振动模式实现减小声音共振腔长度的目的和双气体探测功能。最后讨论了该技术的进一步发展方向。This review focuses on discussing the latest progress in Quartz-enhanced photoacoustic spectroscopy（QEPAS）based trace gas sensing and the trend in the next few years.Fundamentals of QEPAS are described in the beginning and the different QEPAS configurations employing a standard 32.7 kHz quartz tuning fork（QTF）are introduced.Variant methods aiming to improve detection sensitivity and suppress sensor noise level are reported.Moreover,a review regarding developments of customized QTFs for trace gas sensing is present. Novel spectrophone configurations,with which the detection sensitivity is improved by two orders of magnitude,are reviewed.The customized QTFs operating in overtone modes significantly decrease the length of acoustic microresonators and realize dual gas simultaneous detection.Finally,the development direction of the QEPAS technique is discussed.

关 键 词：光谱学 激光光谱 石英增强光声光谱 音叉式石英晶振 痕量气体传感 

分 类 号：O433.4[机械工程—光学工程]