CoSiB/Pd多层膜垂直各向异性及热稳定性的研究  

Perpendicular Magnetic Anisotropy and Thermal Stability in CoSiB/Pd Multilayers

作　　者：卢学鹏 俱海浪[1] 刘帅[1] 息剑峰 李宝河[1] Lu Xuepeng;Ju Hailang;Liu Shuai;Xi Jianfeng;Li Baohe(School of Science,Beijing Technology and Business University,Beifing 102488,China)

机构地区：[1]北京工商大学理学院

出　　处：《稀有金属》2018年第10期1054-1059,共6页Chinese Journal of Rare Metals

基　　金：北京市教育委员会2018年度科技计划重点项目(KZ201810011013);北京工商大学青年教师科研启动基金项目(QNJJ2016-18)资助

摘　　要：采用磁控溅射方法在玻璃基片上制备了以Pd为底层的CoSiB／Pd多层膜样品，利用反常霍尔效应研究了多层膜垂直磁各向异性（perpendicular magnetic anisotropy，PMA）及薄膜的热稳定性。实验中改变了样品周期层中各层的厚度和周期数，结果表明这些变化对反常霍尔效应有着重要的影响。本实验通过对这些参数的调节获得了最佳多层膜样品结构Pd（3）／[CoSiB（0．5）／Pd（0．8）]2，周期层中CoSiB和Pd的最佳厚度分别为0．5和0．8BITI，最佳周期数为2。根据最佳样品的磁滞回线，计算得出该样品的有效各向异性常数Keff为9．0×10^4J·m^-3，说明样品具有良好的PMA性能。之后又对Pd（3）／[CoSiB（0．5）／Pd（0．8）]2进行了热稳定性分析，由于适当的退火有利于提高样品的结晶度，结果发现样品在200℃退火1h之后的KⅡ提高到了9．6××10^4J·m^-3，样品的PMA性能得到了进一步的提高。而退火温度超过300℃时，由于高温破坏了多层膜界面，导致其PMA明显变差。该样品的总厚度为5．6nm，完全满足制备垂直磁结构材料的厚度要求。这些特点使其有利于作为自由层应用到磁隧道结构中。The samples of CoSiB/Pd muhilayers were successfully manufactured by magnetron sputtering technique on the glass sub- strate. The perpendicular magnetic anisotropy （PMA） of each of the samples and thermal stability are studied by anomalous Hall effect （AHE） method. The thickness and the various repetition times of CoSiB/Pd bilayer were changed, which indicate that those factor are important for anomalous Hall effect. We got the best structure of sample in the end. It is Pd （ 3 ） / [ CoSiB （ 0.5 ）/Pd （ 0.8 ） ] 2. The optimal thicknesses of CoSiB and Pd layers in the periodic muhilayer were 0.4 and 0.8 nm, respectively, and the optimal periodicity was 3. In addition, the effective magnetic anisotropy constant of the sample is 9.0×10^4J·m^-3, which contribute to the good perpendicular magnetic anisotropy. In addition, the sample of Pd （ 3 ） / [ CoSiB （0.5）/Pd （0.8） ]2 muhilayers was studied by thermal stability. Due to the appropriate annealing to improve the crystallinity of the sample. The results that the effective magnetic anisotropy constant of the sample is 9.6×10^4J·m^-3 after 200℃ annealing for an hour. The perpendicular magnetic anisotropy has been further improved. In addition, the perpendicular magnetic anisotropy is bad after more than 300℃ annealing for an hour. because the interface was destroyed. The total thickness of the sample is 5.6 nm, it is expected to be applied to the magnetic tunnel structure as a vertical free layer in the future.

关 键 词：CoSiB/Pd多层膜 反常霍尔效应 垂直磁各向异性 有效各向异性常数 

分 类 号：O469[理学—凝聚态物理]