高频电感耦合等离子体炬内速度及温度空间分布的数值计算  

Numerical Calculation of Spatial Distribution of Temperature and Velocity in Inductively Coupled Plasma Torch

作　　者：陈文波[1,2] 陈伦江[1] 刘川东[1] 程昌明[1] 童洪辉[1] 朱海龙[3] CHEN Wenbo;CHEN Lunjiang;LIU Chuandong;CHENG Changming;TONG Honghui;ZHU Hailong(Southwestern Institute of Physics,Chengdu 610041,China;College of Electrical Engineering,University of South China,Hengyang 421001,China;College of Physics and Electronics Engineering,Shanxi University,Taiyuan 030006,China)

机构地区：[1]核工业西南物理研究院,成都610041 [2]南华大学电气工程学院,衡阳421001 [3]山西大学物理电子工程学院,太原030006

出　　处：《高电压技术》2018年第9期3035-3042,共8页High Voltage Engineering

基　　金：国家自然科学基金(11535003,11675074);湖南省教育厅项目(15C1174)~~

摘　　要：研究高频电感耦合等离子体炬内部空间的速度和温度分布对等离子体炬的稳定运行有着十分重要的指导意义。为此首先建立了100 kW高频电感耦合热等离子体炬的二维轴对称模型,然后利用商业软件ANSYS FLUENT对纯氩热等离子体电磁场、速度及温度的空间分布进行了计算,并在此基础上分别研究了粉末携带气、反应气及冷却气体积流量的变化对等离子体炬内速度和温度空间分布产生的影响,研究结果表明：等离子体炬内速度和温度空间分布受粉末携带气体积流量变化的影响较大,而反应气体积流量的变化仅对等离子体温度有一定的影响,过高的反应气体积流量可能导致灭弧现象的产生;等离子体炬外管附近区域的温度会随冷却气体积流量的增加而快速下降,因此在实际工作过程中可通过加大冷却气的流量来达到保护炬外管的目的。The study on the spatial distribution of temperature and velocity of the inductively coupled thermal plasma can provide valuable theoretical guidelines for the steady running（practical application） of plasma torch. Therefore,we set up a two-dimensional axisymmetric model of 100 k W inductively coupled plasma, and calculated the spatial distribution of temperature and velocity for argon thermal plasma using the ANSYS FLUENT software with this model. Moreover, we studied the influences of the working gas flow and adding hydrogen on the spatial distribution of temperature and velocity in detail on the basis of calculated results. The research results show that the carrier gas flow rate significantly affects the spatial distribution of plasma temperature and velocity, and the excessive reaction gas flow rate will quench plasma arc. Increasing the sheath gas can greatly reduce the temperature at the edge of the torch. So we can protect the outer tube of plasma torch by increasing the sheath gas in the experiment.

关 键 词：电感耦合 数值计算 温度 速度 氩气等离子体 

分 类 号：TH70[机械工程—仪器科学与技术]