MEMS器件中微气泡执行器气泡动力学研究  

Study on Bubble Dynamics of a Micro-Bubble Actuator in MEMS Devices

作　　者：王淑香[1] 徐立[2] 童军杰[1] 曹雪玲[1] 刘志军[1] Wang Shuxiang;Xu Li;Tong Junjie;Cao Xueling;Liu Zhijun(Guangzhou Maritime University,Guangzhou 510725,China;Guangdong Provincial Institute of Metrology,Guangzhou 510405,China)

机构地区：[1]广州航海学院,广州510725 [2]广东省计量科学研究院,广州510405

出　　处：《微纳电子技术》2018年第11期811-818,共8页Micronanoelectronic Technology

基　　金：广东省自然科学基金资助项目(2015A030313819,2015A030313806);广州航海学院引进人才项目(E230202)

摘　　要：采用标准MEMS工艺,设计并制造了一种微芯片来研究微通道中微气泡执行器的气泡动力学行为。在矩形硅微通道内,结合同步的温度响应曲线和高速可视化实验系统研究了各可控参数（热流密度、脉冲频率和主流流速）对微气泡执行器（40μm×20μm）的核化温度、温升速率、气泡生长延迟时间差及气泡形态等气泡动力学行为的影响。结果表明,随着热流的增大,气泡核化的时间前移,最大气泡的直径增大;脉冲频率越高,温升速度越快,最大气泡的直径越小;主流流速越高,气泡生长延迟时间差越长,且低流速下由于小气泡的出现将导致膜温响应曲线出现锯齿状波动;在实验的工况下,气泡的核化温度受可控参数的影响不大,均保持在120℃左右。A micro-chip was designed and manufactured by the standard micro-electromechanical system（MEMS）technology to study the bubble dynamics of the micro-bubble actuator in the microchannel.In the rectangular silicon microchannel,the effects of the controllable parameters（heat flux density,pulse frequency and mainstream velocity）on the bubble dynamics,such as the nucleation temperature,heating rate,bubble growth delay time difference and bubble shape of the micro-bubble actuator（40μm×20μm）were investigated by the simultaneous temperature response curve and high speed visualization experiment system.The results show that the time of the bubble nucleation moves forward and the biggest bubble diameter increases with the increase of the heat flux.The higher the pulse frequency,the faster the temperature increases,and the smaller the biggest bubble diameter.The higher the mainstream velocity,the longer the bubble growth delay time difference.At the low flow velocity,there is a sawtooth wave in the film temperature response curve due to appearing small bubbles.In the experiment,the controlled parameters have slightly effect on the bubble nucleation temperature,and the bubble nucleation temperature maintains at about 120 ℃.

关 键 词：微电子机械系统(MEMS) 微气泡执行器 微通道 气泡动力学 可控参数 

分 类 号：TH703[机械工程—仪器科学与技术] TK124[机械工程—精密仪器及机械]