基于栅格样版正交方向扫描的精准测量  

Accurate Measurement Based on Orthogonal Scanning of Grid Templates

作　　者：孟凡娇 傅云霞[2] 邵力[2] 赵军[1] 雷李华 Meng Fanjiao;Fu Yunxia;Shao Li;Zhao Jun;Lei Lihua(China Jiliang University,Hangzhou 310018,China;Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]中国计量大学,杭州310018 [2]上海市计量测试技术研究院,上海201203

出　　处：《微纳电子技术》2018年第11期824-830,共7页Micronanoelectronic Technology

基　　金：国家重大仪器专项资助项目(2014YQ090709);国家自然科学基金面上项目(51475335)

摘　　要：作为横向标准样版,栅格标准样版被广泛应用于校准各类显微镜测头的放大倍率以及图像畸变,因此,对栅格样版的精准测量是保证测量仪器量值准确传递的基础。提出了一种基于双角度偏转原理的快速、精确定位一维栅格结构的正交扫描方向角的提取方法,并通过模型转换实现了二维栅格结构的“行方向”、“列方向”正交扫描方向角提取的拓展;分析了一维和二维光栅结构的误差修正方法,通过集成的原子力显微镜（AFM）测头和激光共聚焦测头（LFS）的计量型纳米测量系统对栅格标准样版进行了多次重复性测量。结果表明,正交扫描方向角的有效提取,能大大提高周期性栅格结构的评价精度和准确性。As a horizontal standard template,the grid standard template is widely used for calibrating the magnifying power and image distortion of various types of microscope probes.Therefore,the precise measurement of a grid template is the basis for ensuring the quantity value accurate transmission of measuring instruments.Based on the dual-angle-deflection principle,a fast and pinpoint method was proposed to extract the orthogonal scanning direction angles of a one-dimensional grid structure,and the orthogonal scanning direction angle extraction was extended for the ＂transverse direction＂ and ＂longitudinal direction＂ of the two-dimensional grid structure by model transformation.The error correction methods for one-dimensional and two-dimensional grating structures were analyzed.Repetition measurements for the grid standard template were carried out by using metrological nanometer measurement system integrated the atomic force microscope（AFM）probe and laser focus sensor（LFS）.The results show that the effective extraction of the orthogonal scanning direction angle can greatly improve the evaluation precision and accuracy of the periodic grid structure.

关 键 词：栅格标准样版 图像畸变 正交扫描方向角 误差修正方法 纳米测量系统 

分 类 号：TN305.6[电子电信—物理电子学]