非本征F-P腔光纤传感器膜片材料仿真分析  

Simulation analysis on diaphragm material of non-intrinsic F-P cavity fiber-optic sensor

作　　者：姜飞[1] 李晨 李英娜[1] 赵振刚[1] 李川[1] JIANG Fei, LIChen, LI Ying-na, ZHAO Zhen-gang, LI Chuan(Faculty of Information Engineering and Automation, Kunming University of Science and Technology, Kunming 650500, China)

机构地区：[1]昆明理工大学信息工程与自动化学院,云南昆明650500

出　　处：《传感器与微系统》2018年第9期32-34,37,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51667011;51567013)

摘　　要：研制了石英膜片的非本征法布里—珀罗(F-P)腔光纤传感器,用于强磁场和高电压环境的超声波检测,并对超声波信号进行测量。通过ANSYS对不同材料的膜片进行有限元仿真分析,得出各自的灵敏度、响应频率与膜片半径之间的关系,并选择性能适合的膜片材料研制了光纤传感器。通过设计解调系统,使用石英材料膜片的传感器测试超声波信号的频率,并对测得的信号与压电传感器测得信号进行对比分析。仿真结果表明:在相同半径和厚度的不同材料膜片下,石英玻璃材料的固有频率和灵敏度相对适中。实验测得压电传感器超声波频率为33 k Hz,F-P腔光纤传感器测得频率为31. 3 k Hz,2种传感器测得数据相近,实验表明:石英材料适合作为非本征F-P腔光纤传感器的膜片材料。A non-intrinsic Fabry-Perot（ F-P） cavity optical fiber sensor of quartz diaphragm is researched and fabricated for ultrasonic detection of strong magnetic field and high voltage environment and the ultrasonic signal is measured. The finite element simulation of the diaphragms of different materials is carried out by ANSYS. The relationship between the sensitivity,the response frequency and the diaphragm radius is obtained,and suitable fiber sensor is developed. Through the design of the demodulation system,use quartz material diaphragm sensor to test the frequency of ultrasonic signals,and the measured signal is comparied with piezoelectric sensor measured signal and analyzed. The simulation results show that the natural frequency and sensitivity of the quartz glass material are moderate compared with the different materials under the same radius and thickness,and the ultrasonic frequency of the piezoelectric sensor is 33 k Hz. The frequency of the F-P cavity fiber sensor is31. 3 k Hz,data measured by two sensors are similar. Experiments show that the quartz material is suitable as a diaphragm material for non-intrinsic F-P cavity fiber-optic sensors.

关 键 词：膜片材料 灵敏度 响应频率 解调系统 

分 类 号：TN253[电子电信—物理电子学]