大口径激光钕玻璃均匀性拼接检测技术  

Splicing Detection Technique of Homogeneity of Large-Aperture Laser Neodymium Glass

作　　者：白云波[1] 周游[1] 刘世杰[1] 邵建达[1] 徐隆波[2] Bai Yunbo;Zhou You;Liu Shijie;Shao Jianda;Xu Longbo(Key Laboratory of Materials for High Power Laser,Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences,Shanghai 201800,China;School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing,Jiangsu 210094,China)

机构地区：[1]中国科学院上海光学精密机械研究所强激光材料重点实验室,上海201800 [2]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学学报》2018年第9期201-206,共6页Acta Optica Sinica

基　　金：国家自然科学基金(11602280)

摘　　要：提出了基于600mm口径干涉仪的一维子孔径拼接测量方法,通过像素错位误差模拟分析结果,设计并研制了一维大行程气浮型精密扫描拼接平台,实现了对角线接近1m的大口径激光玻璃的全口径光学均匀性拼接检测,并对该技术的拼接测量精度和重复性进行了验证。结果表明:拼接结果平滑,均匀性拼接测量与直接测量结果的相对误差优于2×10-7,全口径均匀性的重复性优于4×10-8,单口径均匀性测量结果与拼接后相同区域的均匀性结果最大差异为2×10-7。A measurement technique of one-dimensional（1 D）sub-aperture splicing based on an interferometer with the aperture of 600 nm is proposed.With the analysis of pixel offset error simulation results,a 1 Dlarge air-float precision scanning splicing platform is designed and developed,the splicing detection of full aperture optical homogeneity of a large aperture laser glass with a diagonal close to 1 mis realized,and the accuracy and the repeatability of this technique are tested.The results show that the splicing results are smooth,the relative error between the homogeneous splicing and direct measurement results is superior to 2×10^-7,the repeatability of full aperture homogeneity is superior to 4×10^-8,and the largest difference between the measurement homogeneity results of single-aperture and the same region after splicing is 2×10^-7.

关 键 词：测量 光学均匀性 拼接检测 激光玻璃 

分 类 号：TN247[电子电信—物理电子学]