硼掺杂锌锡氧化物靶材的制备、组织及性能研究  

Study on Fabrication, Microstructure and Properties of BZTO Targets

作　　者：刘永 郗雨林[1] LIU Yong;XI Yulin(Luoyang Ship Material Research Institute,Luoyang 471023,China)

机构地区：[1]中国船舶重工集团公司第725研究所

出　　处：《热加工工艺》2018年第18期105-108,共4页Hot Working Technology

摘　　要：采用纳米B2O3、ZnO和SnO2粉末原料和氧压烧结法,在1200~1250℃烧结制备出不同硼掺杂量的锌锡氧化物（ZTO）陶瓷靶材（BZTO）。借助SEM、XRD,研究了掺杂量、烧结温度等对BZTO靶材微观组织及性能的影响。结果表明,B2O3在BZTO中的存在状态与加热/烧结温度紧密相关。600℃加热后,B2O3主要固溶于SnO2和ZnO晶格中;1000℃和1250℃烧结后,B2O3与ZnO反应生成Zn5B4O11中间相,也会部分固溶于基体相中。在1250℃烧结时,3.0wt%B2O3掺杂的BZTO靶材晶粒细小,组织致密,相对密度也最高。BZTO targets doped with different content of boron were fabricated by nano-B2O3,ZnO and SnO2powders and oxygen pressure sintering method at 1200-1250℃.The effects of doping amount and sintering temperature on the microstructure and properties of BZTO targets were studied by SEM and XRD.The results show that the existence state of B2O3in BZTO is closely related to heating/sintering temperature.After heating at 600℃,B2O3is mainly soluble in SnO2and Zn O lattices;after sintering at 1000℃and 1250℃,B2O3reacts with ZnO to form Zn5B4O11 mesophase,and it is also partially soluble in matrix phase.The BZTO target doped with 3.0wt%B2O3has fine grain,compact structure and highest relative density when sintered at 1250℃.

关 键 词：BZTO 制备 显微组织 性能 

分 类 号：TG148[一般工业技术—材料科学与工程]