High order DBR GaSb based single longitude mode diode lasers at 2 μm wavelength  

作　　者：Hao Luo Cheng'ao Yang Shengwen Xie Xiaoli Chai Shushan Huang Yu Zhang Yingqiang Xu Zhichuan Niu 

机构地区：[1]State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences [2]College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences [3]Synergetic Innovation Center of Quantum Information and Quantum Physics,University of Science and Technology of China

出　　处：《Journal of Semiconductors》2018年第10期58-63,共6页半导体学报（英文版）

基　　金：Project supported by the National Basic Research Program of China(Nos.2016YFB0402403,2014CB643903);the National Natural Science Foundation of China(Nos.61790583,61435012)

摘　　要：The GaSb-based distributed Bragg reflection（DBR） diode laser with 23 rd-order gratings have been fabricated by conventional UV lithography and inductively coupled plasma（ICP） etching. The ICP etching conditions were optimized and the relationship among etching depth, duty ratio and side-mode suppression ratio（SMSR） was studied. The device with a ridge width of 100 μm, gratings period of 13 μm and etching depth of 1.55 μm as well as the duty ratio of 85% was fabricated, its maximum SMSR reached 22.52 dB with uncoated cavity facets under single longitudinal operation mode at room temperature.The GaSb-based distributed Bragg reflection（DBR） diode laser with 23 rd-order gratings have been fabricated by conventional UV lithography and inductively coupled plasma（ICP） etching. The ICP etching conditions were optimized and the relationship among etching depth, duty ratio and side-mode suppression ratio（SMSR） was studied. The device with a ridge width of 100 μm, gratings period of 13 μm and etching depth of 1.55 μm as well as the duty ratio of 85% was fabricated, its maximum SMSR reached 22.52 dB with uncoated cavity facets under single longitudinal operation mode at room temperature.

关 键 词：GaSb-based distributed Bragg reflection inductively coupled plasma single longitudinal mode highorder gratings 

分 类 号：TN248[电子电信—物理电子学]