激光化学气相沉积法制备YBa_2Cu_3O_(7-δ)超导薄膜  

Preparation of YBa_2Cu_3O_(7-δ) Superconductor Film by Laser Chemical Vapor Deposition

作　　者：吴慰 张琼 苏轼 赵培 WU Wei;ZHANG Qiong;SU Shi;ZHAO Pei(School of Materials Science and Engineering,Wuhan Institute of Technology,Wuhan 430205,China)

机构地区：[1]武汉工程大学材料科学与工程学院,湖北武汉430205

出　　处：《武汉工程大学学报》2018年第5期514-523,共10页Journal of Wuhan Institute of Technology

基　　金：国家自然科学基金(51302199);湖北省自然科学基金杰出青年科学基金(2014CFA044);武汉市青年科技晨光计划(2014072704011253)

摘　　要：采用激光化学气相沉积法在(100)取向Al_2O_3衬底上制备了第二代高温超导YBa_2Cu_3O_(7-δ)(YBCO)薄膜,研究了前驱体Y(DPM)3、Ba(DPM)2、Cu(DPM)2的蒸发温度对YBCO薄膜成分的影响规律。通过X射线衍射、扫描电子显微镜、背散射电子显微镜对薄膜进行了表征。结果表明:制备的YBCO薄膜样品成分中含有以下化合物:YBCO、CuYO_2、Cu_2O、Cu_4O_3、Y_2O_3、CuO、CuBaO_2、BaY2O_4、Ba_2Cu_3O_x。在激光功率为130 W,沉积温度为1 123 K,腔体压强为1 kPa,前驱体蒸发温度分别为TY=453 K、TBa=603 K和TCu=453 K的条件下制得成分较单一的c-轴取向YBCO薄膜。同时结果表明载流气Ar气的流速对薄膜成分存在一定影响。The YBa2Cu3O7-δ（YBCO）thin films of the second generation high temperature superconductor were prepared on（100）-oriented Al2O3 substrates by laser chemical vapor deposition. Influences of the evaporationtemperatures of precursors[Y（DPM）3,Ba（DPM）2 and Cu（DPM）2]on composition of YBCO film was studied.The films were characterized by X-ray diffraction,scanning electron microscopy and backscattered electronmicroscopy. And the results showed that the film samples contained the compounds of YBCO,CuYO2,Cu2O,Cu4O3,Y2O3,CuO,CuBaO2,BaY2O4 and Ba2Cu3Ox. Relatively pure c-axis-oriented YBCO films were prepared atlaser power of 130 W,deposition temperature of 1 123 K,total pressure of 1 kPa and precursors evaporation temperatures of TY=453 K,TBa=603 K,TCu=453 K respectively. Simultaneously,the components of YBCO films were influenced by the velocity of carrier gas Ar.

关 键 词：激光化学气相沉积法 YBA2CU3O7-Δ 超导薄膜 显微结构 

分 类 号：TM26[一般工业技术—材料科学与工程]