微细电解加工中亚微米工具电极对刀方法研究  

Study on Tool Setting of Submicron Electrode in Electrochemical Micromachining

作　　者：吴修娟[1] 刘宇[2] WU Xiujuan;LIU Yu(Nanjing Institute of Industry Technology,Nanjing 210023,China;College of Mechanical and Electrical Engineering,Nanjing University ofAeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京工业职业技术学院机械工程学院,江苏南京210023 [2]南京航空航天大学机电学院,江苏南京210016

出　　处：《电加工与模具》2018年第5期29-32,共4页Electromachining & Mould

基　　金：江苏省高校自然科学研究面上项目(16KJB460029);精密制造工程技术研究开发中心开放基金(ZK15-01-02);学校科研基金项目(YK15-01-02)

摘　　要：在微细电解加工中采用常规的对刀方法进行对刀时,亚微米尺度工具电极尖端会产生塑性变形、融化等问题。为了解决这些问题,提出了一种基于超短脉宽电源电流幅值剧增进行对刀的方法;介绍了该对刀方法的机理并进行了软件模拟验证;在此基础之上,提出了亚微米尺度工具电极的对刀方案并进行了试验验证,其结果表明对刀后的亚微米工具电极尖端形貌完好。The tip of the submicron tool electrode would be deformed and thawing when using thetraditional methods of tool setting in the electrochemical micromachining. To solve these problems,amethod based on the sharp increase in current amplitude of high-frequency short-pulse power supplywas proposed. The mechanism of the tool setting was introduced and revealed by software simulation.On this basis,a scheme for submicron tool electrode scale was proposed in tool setting,and it wasshown that the tip morphology of the submicron tool electrode was intact after tool setting inexperiments.

关 键 词：微细电解加工 对刀 超短脉宽电源 亚微米工具电极 电流幅值 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]