超导太赫兹直接检测器的制备技术研究  

Preparation of superconducting terahertz direct detector

作　　者：王海萍 曹春海[1] 刘奥谱 徐祖雨 孙国柱[1] 陈健[1] 许伟伟[1] 吴培亨[1] Wang Haiping;Cao Chunhai;Liu Aopu;Xu Zuyu;Sun Guozhu;Chen Jian;Xu Weiwei;Wu Peiheng(Research Institute of Superconducting Electronics,Nanjing University,Nanjing 210093,China)

机构地区：[1]南京大学超导电子研究所,南京210093

出　　处：《低温与超导》2018年第10期40-44,共5页Cryogenics and Superconductivity

基　　金：国家自然科学基金项目(11474154;61571219)资助

摘　　要：本文研究了超导太赫兹直接检测器的制备流程和关键工艺技术,采用步进投影式光刻技术,来满足检测器对小面积超导隧道结和高频宽带匹配电路的高精度尺寸要求。实验获得了Nb膜反应离子刻蚀形成约42°斜坡角度的刻蚀气体CF4/O2比,解决了超导微带线在天线边缘处容易断线问题,成功制备出超导太赫兹直接检测器样品。The preparation process and key technology of the superconducting terabertz direct detector were studied. Stepper lithography was used to meet the high - precision size requirements of the detector for small - area superconducting tunnel junctions and high -frequency broadband match circuits. The CF4/O2 etching gas of RIE Nb film for the 42° slope angle was obtained by the experiment, which solved the breakage problem of the superconducting microstrip line at the edge of the antenna. The superconducting terahertz direct detector samples were successfully prepared.

关 键 词：Nb/Al-AlOx/Nb 隧道结 太赫兹检测器 斜坡刻蚀 制备工艺 

分 类 号：O441[理学—电磁学] TP216[理学—物理]