用傅立叶变换红外光谱法检测气体中微量氟化氢  

Determination of Hydrogen Fluoride in Gas by FT-IR Infrared Spectroscopy

作　　者：丛庆 李福芬 李扬 曲庆 CONG Qing;LI Fufen;LI Yang;QU Qing(Dalian Special Gas Industry Company,Dalian 116021,China)

机构地区：[1]大连大特气体有限公司,辽宁大连116021

出　　处：《低温与特气》2018年第5期38-41,50,共5页Low Temperature and Specialty Gases

摘　　要：采用傅立叶变换红外光谱法(FT-IR)测定微量氟化氢气体,根据氟化氢的特性,对进样系统的吸附性进行了试验,以选取合理的实验设备和合适的进样方法;对微量氟化氢进样后残留的清洗方法进行研究,以确定快速高效的清洗方法;对不同浓度的氟化氢工作气体进行测定,考察了氟化氢在所选实验条件下FT-IR响应的线性,以确定合适的校准方法。Determination of trace hydrogen fluoride gas was done using fourier transform infrared spectrometry （FT／｜IR）. According to the characteristics of hydrogen fluoride, adsorption of sampling system was tested for selection of reasonable experimental equipment and suitable sampling method. The cleaning method of trace fluoride after sampling was studied to determine the quick and efficient cleaning method. Using work gases of hydrogen fluoride in different concentrations, the linearity of FT-IR response in the experimental conditions was investigated to determine the appropriate calibration method.

关 键 词：傅立叶变换红外 微量 氟化氢 分析 进样方法 残留清洗 

分 类 号：TQ117[化学工程—无机化工]