探讨用最巨大仪器研究最微小粒子(四) nm工艺流程仪器及代工全球60%芯片制造的tsmc-OEM模式制造“智能”(上)  

Biggest Instrument for Research Smallest Particles(4) Manufacturing “Intelligence”: tsmc-OEM Production of 60% World's VLSI by nm Tech

作　　者：沈经[1] Shen Jing(SAC/TC124, SAC/TC426, ITEI, IHEPCA)

机构地区：[1]全国工业过程测量与控制标准化技术委员会SAC/TC124,全国智能建筑标准化技术委员会SAC/TC426,机械工业仪器仪表综合技术经济研究所,中国科学院高能物理研究所

出　　处：《仪器仪表标准化与计量》2018年第4期1-1,2-8,共8页Instrument Standardization & Metrology

摘　　要：3个模糊观念:1)重视"智能制造"忽视制造"智能",2)把"铸造厂的foundry"与"VLSI的OEM"都看成"代工",3)把高技术知识产权的核心价值看成"附加值",令人热衷于劳动力密集型代工。30年后,该升级到制造"智能"即VLSI芯片制造。介绍制造全球60%VLSI名牌芯片的张忠谋博士56岁创"tsmc-OEM"模式代工及nm工艺流程的仪器群。China＇s manufacturing industry is keeping attention on intelligent manufacturing but ignores the core high technology of manufacturing intelligence. Meanwhile, the foundry and OEM are confused and translated into the same OEM by mediums. Intelligent manufacturing industry should focus on the world＇ s first semiconductor chip manufacturing industry pioneer the world＇s biggest VLSI chip wafer OEM manufacturers＂tsmc＂created by Dr. Chang in 1987. Ithas produced about60% of the global chip Science 1987. Thenm technologicalprocess instruments of VLSI waferhas been introduced.

关 键 词：光刻 电子束摇摆器 极紫外 离子束注入参杂 晶网 大规模集成电路 原始设计制造商 

分 类 号：TN405[电子电信—微电子学与固体电子学]