玻璃基板光学检测仪器气浮工作台特性仿真研究  

Simulation study on the characteristics of air bearing table in glass substrate optical detection equipment

作　　者：权露 陶晓杰[1] 张群 张蓝 Quan Lu;Tao Xiaojie;Zhang Qun;Zhang Lan(School of Instrument Science and Opto-electronics Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《现代制造工程》2018年第11期107-111,共5页Modern Manufacturing Engineering

基　　金：国家重大科学仪器设备开发专项项目(2013YQ220749)

摘　　要：针对2×2对称毛细管节流气浮工作台模型,运用Fluent数值仿真软件分析得到气膜区压力及速度分布、质量流量和承载力等特性,分析毛细管节流器间距、结构参数和供气压力对气浮工作台特性的影响。结果表明:不同节流器间距分布对质量流量影响不大,承载力随节流器间距增大而增大;节流器弯折角度变化对质量流量、承载力和静刚度影响不显著;质量流量和承载力随供气压力的增加而增加。分析结果为设计优化气浮工作台和实际工程需要提供了仿真数据参考。On the basis of analyzing 2 × 2 symmetrical capillary throttle air bearing table model, the Fluent software was used to obtain the pressure and velocity distribution of the gas membrane flow field, mass flow rate and bearing capacity were also obtained, and analyzed the effects of capillary throttle spacing, the structural parameters of capillary throttle and gas supply pressure on the static characteristics of air bearing table. The results show that：the influence of the spacing of restrictors on the mass flow rate is not significant ,bearing capacity increases with the increase of the restrictors＇ spacing;the changing of restrictors＇ angle has little effect on mass flow rate, bearing capacity and static stiffness;mass flow rate and bearing capacity increase with the increase of gas supply pressure. The results provide a simulation data reference for the design of air bearing table and the actual engineering needs.

关 键 词：气浮工作台 毛细管节流 静特性 Fluent数值仿真 

分 类 号：TH138.1[机械工程—机械制造及自动化]