大口径折反式355nm激光接收系统的调试方法  

Alignment of large aperture catadioptric 355nm laser receiving system

作　　者：范二荣 胡明勇[1] 封志伟[1] 赵奇[1] 李明杰[1] FAN Errong;HU Mingyong;FENG Zhiwei;ZHAO Qi;LI Mingjie(Institute of Optoelectronic Technology,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学光电技术研究院,安徽合肥230009

出　　处：《量子电子学报》2018年第6期653-659,共7页Chinese Journal of Quantum Electronics

摘　　要：为实现大口径折反式355 nm激光接收系统的装调,提出了局部针对性的调试方法.两镜系统采用波长为355 nm和632.8 nm、镜间距一致的4D干涉仪自准直调试法;透镜组采用355 nm激光器和干涉仪前置镜头组成的自准直检测光路调试法。调试后得到两镜系统波像差均方根(RMS)为0.2026λ,满足设计指标0.2λ(λ为632.8 nm)的要求;透镜组调试后,理论后截距与自准直检测后截距差值在设计指标容差范围内。两镜系统与聚焦透镜组系统组合调试后,像方与物方焦点重合,接收系统调试满足设计要求。所提方法降低了系统装调难度,缩短了系统装调周期。In order to realize alignment of the large aperture catadioptric 355 nm laser receiving system, a local specific alignment method is put forward. Two-mirror system with wavelength of 355 nm, 632.8 nm mirrors and consistent mirror spacing uses 4D interferometer self-collimation debugging method. The lens group adopts self-collimation detection optical path debugging method composed of 355 nm laser and interferometer front lens. After alignment, the root mean square （RMS） of wave aberration in two-mirror system is 0.2026λ, which satisfies the design requirement of 0.2 λ （λ is 632.8 nm）. After the alignment of lens group, the difference between theoretical and self-collimation detection rear cut-off distances is in the range of design index tolerance. After the combination alignment of the two-mirror system and focusing lens group system, the focus of image and that of object are consistent, and the alignment of receiving system meets the design requirements. The proposed method reduces the difficulty of system alignment and shortens the system alignment cycle.

关 键 词：激光技术 光学调试 自准直调试 大口径折反系统 355nm激光器 

分 类 号：TH743[机械工程—光学工程]