光纤法珀腔声传感器理论与仿真分析研究  

Simulation and Theoretical Analysis on Fiber Fabry-Perot Cavity Acoustic Sensors

作　　者：程进[1] 邹小平[1] CHENG Jin;ZOU Xiaoping(Research Center for Sensor Technology,Beijing Key Laboratory for Sensor,Ministry of Education Key Laboratory for ModernMeasurement and Control Technology,Beijing Information Science and Technology University,Beijing 100101,China)

机构地区：[1]北京信息科技大学传感技术研究中心北京市传感器重点实验室教育部现代测控技术重点实验室,北京100101

出　　处：《传感技术学报》2018年第11期1633-1640,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61401432);北京市自然科学基金(Z160002);集成光电子学国家重点实验室开放课题(IOSKL2016KF19);北京市传感器重点实验室开放课题(KF20181077203);北京信息科技大学重点研究培育项目(2018022)

摘　　要：根据干涉原理,对基于低精细度法珀腔的光纤声传感器的敏感机理进行了理论分析,明确了采用单色光源工作时需要满足正交相位点和小信号的条件。采用ANSYS软件,对敏感声波的振膜进行了预应力振动模态和预应力谐响应有限元分析,仿真了在声波作用下振膜的振动特性,以及其频率响应特性。进一步分析了光纤法珀腔声传感器的灵敏度与材料、结构、光学、电学参量的关系,以及它的动态范围。The mechanism of fiber Fabry-Perot cavity acoustic sensor is analyzed theoretically. In the case of monochromatic light as source,the fiber acoustic sensor needs to work at the orthogonal phase point and small signal. By using ANSYS software,the vibration mode and the harmonic response of tensioned membrane are simulated. And the vibration characteristics of the membrane under sound wave and the frequency response characteristic of the fiber acoustic sensor are simulated. The relationship between sensitivity of fiber Fabry Perot cavity acoustic sensor and material,structure,optical and electrical parameters is further analyzed,and its dynamic range is also discussed.

关 键 词：光纤声传感器 法珀腔 仿真分析 灵敏度 动态范围 

分 类 号：TN253[电子电信—物理电子学]