热释电传感器声功率测量的机理研究  

Study on the Mechanism of Acoustic Power Measurement of Pyroelectric Sensor

作　　者：陈倩 曹永刚 王月兵 CHEN Qian;CAO Yonggang;WANG Yuebing(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018

出　　处：《传感技术学报》2018年第11期1652-1656,共5页Chinese Journal of Sensors and Actuators

基　　金：国家重点研发项目(2016YFF0201006);国家自然科学基金(11474259)

摘　　要：设计了一种聚偏氟乙烯(PVDF)热释电传感器,并通过有限元软件建立该传感器物理模型,对传感器的内部声场分布及升温状况进行了模拟仿真,获得热释电传感器输出信号的形状及幅值;同时,制作了PVDF热释电传感器并对换能器声功率进行测量实验;通过实验与仿真进行对比分析,结果证明了PVDF传感器物理模型的可靠性,且为设计制作高灵敏度PVDF热释电传感器提供理论依据。A polyvinylidene fluoride（PVDF）pyroelectric sensor was designed,the Physical model was built up by using a finite element analysis software. Using the model,the acoustic field and temperature distributions are simulated,and the output of the pyroelectric sensor was predicted in both waveform and amplitude. Besides that,the sensor prototype was fabricated and the acoustic power of the transducer was measured. Finally,the reliability of the Physical model was confirmed by comparing the measured results with the simulated ones. According this study,some suggestions are provided for design and fabrication of a PVDF pyroelectric sensor with high sensitivity.

关 键 词：热释电传感器 PVDF 声功率 有限元分析 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]