Electropulsing-Induced Microstructural Changes and Their Effects on Electrical Conductivity of Thin Films of an Al-doped ZnO  

作　　者：Y.H.Zhu C.M.Luk 

机构地区：[1]Department of Industrial and Systems Engineering,TheHong Kong Polytechnic University,Hong Kong,China [2]Department of Applied Physics,The Hong Kong PolytechnicUniversity,Hong Kong,China

出　　处：《Acta Metallurgica Sinica(English Letters)》2018年第12期1361-1367,共7页金属学报（英文版）

摘　　要：Electropulsing-induced phase decompositions and microstructural changes in AZO-5 thin films were studied by X-raydiffraction, scanning electron microscopy, atomic force microscopy, Hall effect measurement and photoluminescence （PL）measurement techniques. It was found that the electropulsing induced phase decomposition started with spinodaldecomposition, which was accompanied by discontinuous precipitation in the AZO-5 thin films. Both circular phasedecompositions and the crystal orientation occurred. Inappropriate electropulsing might damage zones, which resulted intremendous decrease in electrical conductivity. Circular changes in both the peak position and the width of the PLwavelength were observed in the EPT AZO-5 thin films. Formation of zones favored reducing the roughness of the thinfilm.Electropulsing-induced phase decompositions and microstructural changes in AZO-5 thin films were studied by X-raydiffraction, scanning electron microscopy, atomic force microscopy, Hall effect measurement and photoluminescence （PL）measurement techniques. It was found that the electropulsing induced phase decomposition started with spinodaldecomposition, which was accompanied by discontinuous precipitation in the AZO-5 thin films. Both circular phasedecompositions and the crystal orientation occurred. Inappropriate electropulsing might damage zones, which resulted intremendous decrease in electrical conductivity. Circular changes in both the peak position and the width of the PLwavelength were observed in the EPT AZO-5 thin films. Formation of zones favored reducing the roughness of the thinfilm.

关 键 词：ELECTROPULSING Phase transformation Electrical conductivity PHOTOLUMINESCENCE Thin-films AZO 

分 类 号：TQ132.41[化学工程—无机化工] TB383.2[一般工业技术—材料科学与工程]