小型分段式高分辨率中阶梯光栅光谱仪的设计  

Design of Small-Size High Resolution Echelle Grating Spectrometer with Divided Spectral Coverage

作　　者：曹海霞 赵英飞 何淼[1,2] 王卫东 王超 Cao Haixia;Zhao Yingfei;He Miao;Wang Weidong;Wang Chao(Central Iron ＆ Steel Research Institute,Beijing 100081,China;NCS Testing Technology Co.,Ltd.,Beijing 100094,China;Institute of Space Electro Optical Technology,Changchun University of Science and Technology,Changchun,Jilin 130022,China)

机构地区：[1]钢铁研究总院,北京100081 [2]钢研纳克检测技术股份有限公司,北京100094 [3]长春理工大学空间光电技术研究所,吉林长春130022

出　　处：《光学学报》2018年第11期35-41,共7页Acta Optica Sinica

基　　金：国家重大科学仪器设备开发专项(2013YQ47078103);国家自然科学基金青年科学基金(61701045;61805028)

摘　　要：由于棱镜具有色散不均匀的特点,中阶梯光栅光谱仪的二维谱图在长波波段不可避免地存在相邻衍射级次间相互干扰的情况。为了克服这一缺点,同时充分利用探测器像面,设计了一种小型分段式的中阶梯光栅光谱仪。通过对中阶梯光栅和棱镜色散原理的详细分析,确定了二者参数与探测器之间的关系,结合双缝间隔设计方法,采用双狭缝切换的方式,给出分段式中阶梯光栅光谱仪的设计方法。利用此方法将系统的波段范围165～800 nm分为165～230 nm和210～800 nm两部分,焦距设计为200 mm,分别采集双波段的二维谱图。使用光学设计软件对光学系统进行仿真,结果表明,200 nm处的实际光谱分辨率可达0.015 nm,满足设计指标的要求。The interference between adjacent diffraction orders is unavoidable in the two-dimensional spectrogram of an echelle grating spectrometer in the long wavelength band due to the non-uniform dispersion of prisms. To avoid this drawback and simultaneously take full advantage of the detector′s imaging plane, we design a small-size echelle grating spectrometer with a divided spectral coverage is designed The relationship between the detector and the parameters of the above two is established via the detailed analysis of the dispersion principle of echelle grating and prism. The design approach of the echelle spectrometer with a divided spectral coverage is proposed with the design idea of double-slit interval and by the way of double-slit switching. With this design approach, the wavelength range of 165-800 nm for the system is divided into 165-230 nm and 210-800 nm, the focus length is set as 200 mm, and the two-dimensional spectrograms at the two bands are collected, respectively. The ray tracing simulation to the optical system is carried out and the results show that the true spectrum resolution at 200 nm is 0.015 nm, which meets the design requirements.

关 键 词：衍射 双缝切换 衍射级次干扰 中阶梯光栅 二维谱图 

分 类 号：O433.1[机械工程—光学工程] TH744.1[理学—光学]