中空型平板波导红外光谱仪的波长定标  

Wavelength Calibration of Infrared Spectrometer Based on Hollow Planar Waveguide

作　　者：吴越 刘家祥[1,3] 方勇华 杨敏[1,2,3] Wu Yue;Liu Jiaxiang;Fang Yonghua;Yang Min(Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei,Anhui 230031,China;University of Science and Technology of China,Heifei,Anhui 230026,China;Key Laboratory of Optical Calibration and Characterization,Chinese Academy of Sciences,Hefei,Anhui 230031,China)

机构地区：[1]中国科学院安徽光学精密机械研究所,安徽合肥230031 [2]中国科学技术大学,安徽合肥230026 [3]中国科学院通用光学定标与表征技术重点实验室,安徽合肥230031

出　　处：《光学学报》2018年第11期371-376,共6页Acta Optica Sinica

基　　金：中国科学院创新基金

摘　　要：为了实现中空型平板波导小型红外光谱仪光谱数据的定量化,在分析实验室常用波长定标方法的基础上,搭建了一种基于CO_2激光器+积分球的波长定标装置。该装置的光谱定标范围宽,且具有较高的分辨率,克服了传统实验室定标方法的缺点,提高了定标精度。首先介绍了中空型平板波导红外光谱仪的工作原理,接着利用该定标装置对光谱仪进行波长定标,然后采用多项式拟合算法完成定标数据的分析,最后通过对两片窄带滤光片的测量完成定标结果的验证。实验结果表明:采用CO_2激光器+积分球组合的方式得到的波长定标方程,其中心波长定标误差不超过0.02μm,光谱分辨率可达144 nm。In order to quantify the spectral data of a miniature infrared spectrometer based on hollow planar waveguide, we built a wavelength calibration device based on carbon dioxide （CO2） laser and integrating sphere on the basis of analyzing the common wavelength calibration method used in the laboratory. The spectrum calibration range of the device is wide and the resolution is high, which overcomes the shortage of traditional laboratory calibration methods and improves the calibration precision. We first introduce the working principle of the infrared spectrometer based on hollow planar waveguide, then use the calibration device to calibrate the wavelength of the spectrometer, and then complete the calibration data analysis by the polynomial fitting algorithm. Finally, the calibration results are verified by the measurement of two narrow band filters. The experimental results show that the calibration error of the central wavelength is not more than 0. 02 μm and the spectral resolution can reach 144 nm by using the combination of CO2 laser and integrating sphere.

关 键 词：光谱学 小型红外光谱仪 平板波导 波长定标 激光器 

分 类 号：O433[机械工程—光学工程]