场发射扫描电镜荷电现象的研究及参数优化  

Solutions to Charge Accumulation on Low Conductivity Surfaces in Imaging with Scanning Electron Microscopy

作　　者：高翔[1] 朱紫瑞[2] 孙伟[1] 郭娟[1] Gao Xiang;Zhu Zirui;Sun Wei;Guo Juan(The College of Chemistry ＆ Material Seience,Northwest University,Xi＇an 710127,China;The School of Cultural Heritage,Northwest University,Xi＇an 710127,China)

机构地区：[1]西北大学化学与材料科学学院,西安710127 [2]西北大学文化遗产学院,西安710127

出　　处：《真空科学与技术学报》2018年第11期1008-1012,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：扫描电子显微镜主要用于样品显微结构的表征分析,在科研和实际工作中应用广泛。荷电现象是最常见的严重影响到SEM图像质量的现象之一,它会造成图像的反差异常、形变等,在导电性不好或很差的样品形貌表征中极为常见。文中以几种导电性较差样品,如陶瓷、倍他环糊精、Si O2、细菌等为对象,通过实验比对后发现,通过加速电压、探头选择、信号选择、图像采集方式等参数的调节能够有效减轻SEM图像的荷电现象,从而提高了图像质量,获得了更为真实的显微结构信息。We experimentally addressed the surface charge accumulation problem in imaging poorly conductive samples,including but not limited to the ceramics, β-cyclodextrin crystalline, SiO2, biological tissues and bacteria, with scanning electron microscopy. The impact of, mechanisms for and solutions to the charge accumulation problem were experimentally investigated. As shown in the experimental results, the proposed possible solutions could effectively ease the surface charge accumulation problems, such as lowering the acceleration voltage, using lower secondary electron detector, combining SE and a fraction of back scattering electron signals, acquiring image in fast scan mode, decreasing emission current, increasing pressure, and etc. We suggest that the solutions be of some technological interest in imaging samples with low conductivity.

关 键 词：场发射扫描电子显微镜 荷电现象 低加速电压 二次电子 

分 类 号：TN16[电子电信—物理电子学] TB383[一般工业技术—材料科学与工程]