ITO靶材第二相的提取方法与分析  

Methods of Extracting and Analyzing of Second-phase of ITO Target

作　　者：杨硕[1] 薛建强[1] 师琳璞[1] YANG Shuo;XUE Jianqiang;SHI Linpu(Luoyang Ship Material Research Institute,Luoyang 471023,China)

机构地区：[1]中国船舶重工集团公司第七二五研究所,河南洛阳471023

出　　处：《材料开发与应用》2019年第1期45-49,共5页Development and Application of Materials

基　　金：国家战略性新兴产业发展专项(发改办高技[2012]1029号)

摘　　要：通过将ITO靶材粉碎、过筛后用王水长时间腐蚀的方法,提取出腐蚀产物。以进口A靶、B靶和C靶粉碎后的腐蚀产物为研究对象,通过SEM、TEM、XRD等检测手段研究3种靶材腐蚀产物的形貌、物相结构和组成成分等。结果表明,腐蚀产物均为第二相,其中A靶第二相为近似等轴体的In_4Sn_3O_(12),B靶和C靶第二相可能同时含有近似等轴体In_4Sn_3O_(12)和"窄片"In_2SnO_5,并且A靶第二相比B靶多出约8.32%,比C靶多出约4.48%。Corrosion product was prepared by sifting out and eroding crushed ITO target powders with aqua regia. Morphologies, structures and components of corrosion products of foreign targets of target-A, target-B and target-C were studied by SEM, TEM and XRD. Results showed that the products were second-phase;the second-phase of target-A was approximate equiaxed, which was considered as In4Sn3O12 and the second-phase of target-B and target-C contain both approximate isometric In4Sn3O12 and narrow slice In2SnO5;the amount of second-phase of target-A was 8.32% more than that of target-B and 4.48% that of target-C.

关 键 词：ITO靶材 腐蚀产物 第二相 靶材黑化 

分 类 号：TB304[一般工业技术—材料科学与工程]