提高石英音叉钨丝探针制作成材率  

Improving rolling yield of quartz tuning fork-tungsten probe

作　　者：李英姿[1] 张应旭[1] 张立文[1] 王振宇[1] 单冠乔 李华[1] 钱建强[1] 

机构地区：[1]北京航空航天大学物理科学与核能工程学院微纳测控与低维物理教育部重点实验室,北京100191

出　　处：《实验技术与管理》2016年第2期34-37,共4页Experimental Technology and Management

基　　金：国家自然科学基金项目(61371008);北京市自然科学基金项目(4132038);北京航空航天大学重大教学改革项目(2013)资助

摘　　要：针对探针的腐蚀及粘接制约原子力显微镜实验开展的问题,提出一种制作原子力显微镜石英音叉钨丝探针的方法。通过对原有腐蚀装置的改进,提高了钨丝针尖的成材率;钨丝探针粘接装置的开发极大地避免了人为因素的干扰,提高了针尖粘接的效率。最后通过实验来验证腐蚀方法及粘接装置的可行性。In view of the problems of corrosion and bonding of tungsten that have been restricting conducting AFM experiments,a method for the manufacture of AFM probe which is made of tungsten and quartz tuning fork is proposed.Improving the original etching device can enhance rates of finished tungsten corrosion and a new bonding device has been used to increase efficiency of the bonding,which greatly avoids the interference of human factors.Finally,some experiments to test the performance of the probe are conducted.

关 键 词：原子力显微镜 石英音叉钨丝探针 工艺改良 粘接装置 

分 类 号：TH742[机械工程—光学工程]