CoMnNiO非晶薄膜热敏电阻  

The CoMnNiO Amorphous Thin Film Thermistor

作　　者：谭辉[1] 陶明德[1] 韩英[1] 

机构地区：[1]中科院新疆物理研究所

出　　处：《自动化仪表》1991年第8期36-38,共3页Process Automation Instrumentation

摘　　要：射频溅射CoMnNiO非晶薄膜是一种新型温度敏感材料。文中介绍了这种材料的材料常数、电阻温度特性以及薄膜电阻率与其厚度,指出薄膜老化是由结构驰豫引起的。文末还介绍了CoMnNiO非晶薄膜热敏电阻的设计原理及其制作方法。The CoMnNiO amorphous thin film deposited by radio frequency sputtering is one of the new temperature sensing materials. The material constant, resistance/temperature characteris- tics and the relation between the resistivity and the thickness of the film are introduced. Also, the fact, that the aging of the thin film is due to the structure relaxation is stated, the design principle and the manufacturing approach of CoMnNiO thin film thermistor are given finally.

关 键 词：CoMnNiO 非晶薄膜 热敏电阻 

分 类 号：TN37[电子电信—物理电子学]