扫描热显微镜测量机理的研究  

STUDY OF THE MEASUREMENT MECHANISMS OF SCANNING THERMAL MICROSCOPE

作　　者：阮修林[1] 韩立[1] 顾毓沁[1] 

机构地区：[1]清华大学工程力学系,北京100084

出　　处：《工程热物理学报》2002年第5期611-613,共3页Journal of Engineering Thermophysics

基　　金：国家自然科学基金资助项目(No.59995550-1)

摘　　要：从理论上分析了扫描热显微镜的传热过程和测量原理,建立了两种工作模式下的热阻网络模型,并对热阻网络中各热阻进行了具体分析,得出了样品本身热阻的表达式;用多种参考材料样品进行了系列实验,结果表明仪器的输出信号与热导率的倒数成线性关系,对理论分析作出了部分验证,为亚微米尺度的热导率测试打下了基础。In this paper the heat transfer process and measurement mechanism of Scanning Ther-mal Microscopy is analyzed theoretically. The thermal resistance circuits of two different modes are established, and formulas of thermal resistances in the circuit are obtained. Several standard samples are measured, and the experiments show that the output signal is linear with 1/λ. These results demonstrate our test principle and make it possible to measure thermal conductivity.

关 键 词：扫描热显微镜 测量机理 热阻 热导率 

分 类 号：TH742[机械工程—光学工程]